4/1/2010	7:36:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2010	7:36:54 AM	Recipe started at 7:36 AM
4/1/2010	7:36:54 AM	H2 valve closed
4/1/2010	7:36:54 AM	BCl3 valve closed
4/1/2010	7:36:54 AM	PH3 valve closed
4/1/2010	7:36:54 AM	SiCl4 pre valve closed
4/1/2010	7:36:54 AM	SiCl4 post valve closed
4/1/2010	7:36:54 AM	Main Vac valve closed
4/1/2010	7:36:54 AM	Bypass valve closed
4/1/2010	7:36:54 AM	Bubbler valve closed
4/1/2010	7:36:54 AM	Helium valve opened
4/1/2010	7:36:54 AM	Helium MFC set to  500.000000
4/1/2010	7:36:54 AM	H2 MFC set to  0.000000
4/1/2010	7:36:54 AM	BCl3 MFC set to  0.000000
4/1/2010	7:36:54 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:36:54 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:36:54 AM	Tube furnace set to 0
4/1/2010	7:38:15 AM	Helium valve closed
4/1/2010	7:38:15 AM	H2 valve closed
4/1/2010	7:38:15 AM	BCl3 valve closed
4/1/2010	7:38:15 AM	PH3 valve closed
4/1/2010	7:38:15 AM	SiCl4 pre valve closed
4/1/2010	7:38:15 AM	SiCl4 post valve closed
4/1/2010	7:38:15 AM	Main Vac valve closed
4/1/2010	7:38:15 AM	Bypass valve closed
4/1/2010	7:38:15 AM	Bubbler valve closed
4/1/2010	7:38:15 AM	Helium MFC set to  0.000000
4/1/2010	7:38:15 AM	H2 MFC set to  0.000000
4/1/2010	7:38:15 AM	BCl3 MFC set to  0.000000
4/1/2010	7:38:15 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:38:15 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:38:15 AM	Tube furnace set to 0
4/1/2010	7:38:15 AM	Run finished at 7:38 AM
4/1/2010	7:38:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2010	7:47:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	7:48:05 AM	Recipe started at 7:48 AM
4/1/2010	7:48:05 AM	H2 valve closed
4/1/2010	7:48:05 AM	BCl3 valve closed
4/1/2010	7:48:05 AM	PH3 valve closed
4/1/2010	7:48:05 AM	SiCl4 pre valve closed
4/1/2010	7:48:05 AM	SiCl4 post valve closed
4/1/2010	7:48:05 AM	Main Vac valve closed
4/1/2010	7:48:05 AM	Bypass valve closed
4/1/2010	7:48:05 AM	Bubbler valve closed
4/1/2010	7:48:05 AM	Helium valve opened
4/1/2010	7:48:05 AM	Helium MFC set to  500.000000
4/1/2010	7:48:05 AM	H2 MFC set to  0.000000
4/1/2010	7:48:05 AM	BCl3 MFC set to  0.000000
4/1/2010	7:48:05 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:48:05 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:48:05 AM	Tube furnace set to 0
4/1/2010	7:48:07 AM	Helium valve closed
4/1/2010	7:48:07 AM	H2 valve closed
4/1/2010	7:48:07 AM	BCl3 valve closed
4/1/2010	7:48:07 AM	PH3 valve closed
4/1/2010	7:48:07 AM	SiCl4 pre valve closed
4/1/2010	7:48:07 AM	SiCl4 post valve closed
4/1/2010	7:48:07 AM	Main Vac valve closed
4/1/2010	7:48:07 AM	Bypass valve closed
4/1/2010	7:48:07 AM	Bubbler valve closed
4/1/2010	7:48:07 AM	Helium MFC set to  0.000000
4/1/2010	7:48:07 AM	H2 MFC set to  0.000000
4/1/2010	7:48:07 AM	BCl3 MFC set to  0.000000
4/1/2010	7:48:07 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:48:07 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:48:07 AM	Tube furnace set to 0
4/1/2010	7:48:15 AM	Helium valve closed
4/1/2010	7:48:15 AM	H2 valve closed
4/1/2010	7:48:15 AM	BCl3 valve closed
4/1/2010	7:48:15 AM	PH3 valve closed
4/1/2010	7:48:15 AM	SiCl4 pre valve closed
4/1/2010	7:48:15 AM	SiCl4 post valve closed
4/1/2010	7:48:15 AM	Main Vac valve closed
4/1/2010	7:48:15 AM	Bubbler valve closed
4/1/2010	7:48:15 AM	Bypass valve opened
4/1/2010	7:48:15 AM	Helium MFC set to  0.000000
4/1/2010	7:48:15 AM	H2 MFC set to  0.000000
4/1/2010	7:48:15 AM	BCl3 MFC set to  0.000000
4/1/2010	7:48:15 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:48:15 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:48:15 AM	Tube furnace set to 0
4/1/2010	7:48:46 AM	Helium valve closed
4/1/2010	7:48:46 AM	H2 valve closed
4/1/2010	7:48:46 AM	BCl3 valve closed
4/1/2010	7:48:46 AM	PH3 valve closed
4/1/2010	7:48:46 AM	SiCl4 pre valve closed
4/1/2010	7:48:46 AM	SiCl4 post valve closed
4/1/2010	7:48:46 AM	Bubbler valve closed
4/1/2010	7:48:46 AM	Main Vac valve opened
4/1/2010	7:48:46 AM	Bypass valve opened
4/1/2010	7:48:46 AM	Helium MFC set to  0.000000
4/1/2010	7:48:46 AM	H2 MFC set to  0.000000
4/1/2010	7:48:46 AM	BCl3 MFC set to  0.000000
4/1/2010	7:48:46 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:48:46 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:48:46 AM	Tube furnace set to 0
4/1/2010	7:53:46 AM	H2 valve closed
4/1/2010	7:53:46 AM	BCl3 valve closed
4/1/2010	7:53:46 AM	PH3 valve closed
4/1/2010	7:53:46 AM	SiCl4 pre valve closed
4/1/2010	7:53:46 AM	SiCl4 post valve closed
4/1/2010	7:53:46 AM	Main Vac valve closed
4/1/2010	7:53:46 AM	Bypass valve closed
4/1/2010	7:53:46 AM	Bubbler valve closed
4/1/2010	7:53:46 AM	Helium valve opened
4/1/2010	7:53:46 AM	Helium MFC set to  500.000000
4/1/2010	7:53:46 AM	H2 MFC set to  0.000000
4/1/2010	7:53:46 AM	BCl3 MFC set to  0.000000
4/1/2010	7:53:46 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:53:46 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:53:46 AM	Tube furnace set to 0
4/1/2010	7:55:09 AM	Helium valve closed
4/1/2010	7:55:09 AM	H2 valve closed
4/1/2010	7:55:09 AM	BCl3 valve closed
4/1/2010	7:55:09 AM	PH3 valve closed
4/1/2010	7:55:09 AM	SiCl4 pre valve closed
4/1/2010	7:55:09 AM	SiCl4 post valve closed
4/1/2010	7:55:09 AM	Main Vac valve closed
4/1/2010	7:55:09 AM	Bypass valve closed
4/1/2010	7:55:09 AM	Bubbler valve closed
4/1/2010	7:55:09 AM	Helium MFC set to  0.000000
4/1/2010	7:55:09 AM	H2 MFC set to  0.000000
4/1/2010	7:55:09 AM	BCl3 MFC set to  0.000000
4/1/2010	7:55:09 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:55:09 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:55:09 AM	Tube furnace set to 0
4/1/2010	7:55:24 AM	Helium valve closed
4/1/2010	7:55:24 AM	H2 valve closed
4/1/2010	7:55:24 AM	BCl3 valve closed
4/1/2010	7:55:24 AM	PH3 valve closed
4/1/2010	7:55:24 AM	SiCl4 pre valve closed
4/1/2010	7:55:24 AM	SiCl4 post valve closed
4/1/2010	7:55:24 AM	Main Vac valve closed
4/1/2010	7:55:24 AM	Bubbler valve closed
4/1/2010	7:55:24 AM	Bypass valve opened
4/1/2010	7:55:24 AM	Helium MFC set to  0.000000
4/1/2010	7:55:24 AM	H2 MFC set to  0.000000
4/1/2010	7:55:24 AM	BCl3 MFC set to  0.000000
4/1/2010	7:55:24 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:55:24 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:55:24 AM	Tube furnace set to 0
4/1/2010	7:55:46 AM	Helium valve closed
4/1/2010	7:55:46 AM	H2 valve closed
4/1/2010	7:55:46 AM	BCl3 valve closed
4/1/2010	7:55:46 AM	PH3 valve closed
4/1/2010	7:55:46 AM	SiCl4 pre valve closed
4/1/2010	7:55:46 AM	SiCl4 post valve closed
4/1/2010	7:55:46 AM	Bubbler valve closed
4/1/2010	7:55:46 AM	Main Vac valve opened
4/1/2010	7:55:46 AM	Bypass valve opened
4/1/2010	7:55:46 AM	Helium MFC set to  0.000000
4/1/2010	7:55:46 AM	H2 MFC set to  0.000000
4/1/2010	7:55:46 AM	BCl3 MFC set to  0.000000
4/1/2010	7:55:46 AM	SiCl4 MFC set to  0.000000
4/1/2010	7:55:46 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:55:46 AM	Tube furnace set to 0
4/1/2010	8:00:46 AM	H2 valve closed
4/1/2010	8:00:46 AM	BCl3 valve closed
4/1/2010	8:00:46 AM	PH3 valve closed
4/1/2010	8:00:46 AM	SiCl4 pre valve closed
4/1/2010	8:00:46 AM	SiCl4 post valve closed
4/1/2010	8:00:46 AM	Main Vac valve closed
4/1/2010	8:00:46 AM	Bypass valve closed
4/1/2010	8:00:46 AM	Bubbler valve closed
4/1/2010	8:00:46 AM	Helium valve opened
4/1/2010	8:00:46 AM	Helium MFC set to  500.000000
4/1/2010	8:00:46 AM	H2 MFC set to  0.000000
4/1/2010	8:00:46 AM	BCl3 MFC set to  0.000000
4/1/2010	8:00:46 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:00:46 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:00:47 AM	Tube furnace set to 0
4/1/2010	8:02:09 AM	Helium valve closed
4/1/2010	8:02:09 AM	H2 valve closed
4/1/2010	8:02:09 AM	BCl3 valve closed
4/1/2010	8:02:09 AM	PH3 valve closed
4/1/2010	8:02:09 AM	SiCl4 pre valve closed
4/1/2010	8:02:09 AM	SiCl4 post valve closed
4/1/2010	8:02:09 AM	Main Vac valve closed
4/1/2010	8:02:09 AM	Bypass valve closed
4/1/2010	8:02:09 AM	Bubbler valve closed
4/1/2010	8:02:09 AM	Helium MFC set to  0.000000
4/1/2010	8:02:09 AM	H2 MFC set to  0.000000
4/1/2010	8:02:09 AM	BCl3 MFC set to  0.000000
4/1/2010	8:02:09 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:02:09 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:02:10 AM	Tube furnace set to 0
4/1/2010	8:02:25 AM	Helium valve closed
4/1/2010	8:02:25 AM	H2 valve closed
4/1/2010	8:02:25 AM	BCl3 valve closed
4/1/2010	8:02:25 AM	PH3 valve closed
4/1/2010	8:02:25 AM	SiCl4 pre valve closed
4/1/2010	8:02:25 AM	SiCl4 post valve closed
4/1/2010	8:02:25 AM	Main Vac valve closed
4/1/2010	8:02:25 AM	Bubbler valve closed
4/1/2010	8:02:25 AM	Bypass valve opened
4/1/2010	8:02:25 AM	Helium MFC set to  0.000000
4/1/2010	8:02:25 AM	H2 MFC set to  0.000000
4/1/2010	8:02:25 AM	BCl3 MFC set to  0.000000
4/1/2010	8:02:25 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:02:25 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:02:25 AM	Tube furnace set to 0
4/1/2010	8:02:47 AM	Helium valve closed
4/1/2010	8:02:47 AM	H2 valve closed
4/1/2010	8:02:47 AM	BCl3 valve closed
4/1/2010	8:02:47 AM	PH3 valve closed
4/1/2010	8:02:47 AM	SiCl4 pre valve closed
4/1/2010	8:02:47 AM	SiCl4 post valve closed
4/1/2010	8:02:47 AM	Bubbler valve closed
4/1/2010	8:02:47 AM	Main Vac valve opened
4/1/2010	8:02:47 AM	Bypass valve opened
4/1/2010	8:02:47 AM	Helium MFC set to  0.000000
4/1/2010	8:02:47 AM	H2 MFC set to  0.000000
4/1/2010	8:02:47 AM	BCl3 MFC set to  0.000000
4/1/2010	8:02:47 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:02:47 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:02:47 AM	Tube furnace set to 0
4/1/2010	8:07:47 AM	Helium valve closed
4/1/2010	8:07:47 AM	H2 valve closed
4/1/2010	8:07:47 AM	BCl3 valve closed
4/1/2010	8:07:47 AM	PH3 valve closed
4/1/2010	8:07:47 AM	SiCl4 pre valve closed
4/1/2010	8:07:47 AM	SiCl4 post valve closed
4/1/2010	8:07:47 AM	Bubbler valve closed
4/1/2010	8:07:47 AM	Main Vac valve opened
4/1/2010	8:07:47 AM	Bypass valve opened
4/1/2010	8:07:47 AM	Helium MFC set to  0.000000
4/1/2010	8:07:47 AM	H2 MFC set to  0.000000
4/1/2010	8:07:47 AM	BCl3 MFC set to  0.000000
4/1/2010	8:07:47 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:07:47 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:07:47 AM	Tube furnace set to 0
4/1/2010	8:07:48 AM	Run finished at 8:07 AM
4/1/2010	8:07:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	8:11:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2010	8:11:26 AM	Recipe started at 8:11 AM
4/1/2010	8:11:26 AM	H2 valve closed
4/1/2010	8:11:26 AM	BCl3 valve closed
4/1/2010	8:11:26 AM	PH3 valve closed
4/1/2010	8:11:26 AM	SiCl4 pre valve closed
4/1/2010	8:11:26 AM	SiCl4 post valve closed
4/1/2010	8:11:26 AM	Main Vac valve closed
4/1/2010	8:11:26 AM	Bypass valve closed
4/1/2010	8:11:26 AM	Bubbler valve closed
4/1/2010	8:11:26 AM	Helium valve opened
4/1/2010	8:11:26 AM	Helium MFC set to  500.000000
4/1/2010	8:11:26 AM	H2 MFC set to  0.000000
4/1/2010	8:11:26 AM	BCl3 MFC set to  0.000000
4/1/2010	8:11:26 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:11:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:11:27 AM	Tube furnace set to 0
4/1/2010	8:12:47 AM	Helium valve closed
4/1/2010	8:12:47 AM	H2 valve closed
4/1/2010	8:12:47 AM	BCl3 valve closed
4/1/2010	8:12:47 AM	PH3 valve closed
4/1/2010	8:12:47 AM	SiCl4 pre valve closed
4/1/2010	8:12:47 AM	SiCl4 post valve closed
4/1/2010	8:12:47 AM	Main Vac valve closed
4/1/2010	8:12:47 AM	Bypass valve closed
4/1/2010	8:12:47 AM	Bubbler valve closed
4/1/2010	8:12:47 AM	Helium MFC set to  0.000000
4/1/2010	8:12:47 AM	H2 MFC set to  0.000000
4/1/2010	8:12:47 AM	BCl3 MFC set to  0.000000
4/1/2010	8:12:47 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:12:47 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:12:47 AM	Tube furnace set to 0
4/1/2010	8:12:48 AM	Run finished at 8:12 AM
4/1/2010	8:12:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2010	8:12:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	8:12:51 AM	Recipe started at 8:12 AM
4/1/2010	8:12:51 AM	Helium valve closed
4/1/2010	8:12:51 AM	H2 valve closed
4/1/2010	8:12:51 AM	BCl3 valve closed
4/1/2010	8:12:51 AM	PH3 valve closed
4/1/2010	8:12:51 AM	SiCl4 pre valve closed
4/1/2010	8:12:51 AM	SiCl4 post valve closed
4/1/2010	8:12:51 AM	Main Vac valve closed
4/1/2010	8:12:51 AM	Bubbler valve closed
4/1/2010	8:12:51 AM	Bypass valve opened
4/1/2010	8:12:51 AM	Helium MFC set to  0.000000
4/1/2010	8:12:51 AM	H2 MFC set to  0.000000
4/1/2010	8:12:51 AM	BCl3 MFC set to  0.000000
4/1/2010	8:12:51 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:12:51 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:12:52 AM	Tube furnace set to 0
4/1/2010	8:13:14 AM	Helium valve closed
4/1/2010	8:13:14 AM	H2 valve closed
4/1/2010	8:13:14 AM	BCl3 valve closed
4/1/2010	8:13:14 AM	PH3 valve closed
4/1/2010	8:13:14 AM	SiCl4 pre valve closed
4/1/2010	8:13:14 AM	SiCl4 post valve closed
4/1/2010	8:13:14 AM	Bubbler valve closed
4/1/2010	8:13:14 AM	Main Vac valve opened
4/1/2010	8:13:14 AM	Bypass valve opened
4/1/2010	8:13:14 AM	Helium MFC set to  0.000000
4/1/2010	8:13:14 AM	H2 MFC set to  0.000000
4/1/2010	8:13:14 AM	BCl3 MFC set to  0.000000
4/1/2010	8:13:14 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:13:14 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:13:14 AM	Tube furnace set to 0
4/1/2010	8:13:14 AM	Run finished at 8:13 AM
4/1/2010	8:13:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	8:24:27 AM	Main Vac valve closed
4/1/2010	8:24:28 AM	Bypass valve closed
4/1/2010	8:24:43 AM	Bypass valve opened
4/1/2010	8:24:43 AM	Main Vac valve opened
4/1/2010	8:24:57 AM	Recipe started at 8:24 AM
4/1/2010	8:24:57 AM	Helium valve closed
4/1/2010	8:24:57 AM	BCl3 valve closed
4/1/2010	8:24:57 AM	PH3 valve closed
4/1/2010	8:24:57 AM	SiCl4 pre valve closed
4/1/2010	8:24:57 AM	SiCl4 post valve closed
4/1/2010	8:24:57 AM	Main Vac valve closed
4/1/2010	8:24:57 AM	Bypass valve closed
4/1/2010	8:24:57 AM	Bubbler valve closed
4/1/2010	8:24:57 AM	H2 valve opened
4/1/2010	8:24:57 AM	Helium MFC set to  0.000000
4/1/2010	8:24:57 AM	H2 MFC set to  500.000000
4/1/2010	8:24:57 AM	BCl3 MFC set to  0.000000
4/1/2010	8:24:57 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:24:57 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:24:57 AM	Tube furnace set to 1000
4/1/2010	8:26:19 AM	Helium valve closed
4/1/2010	8:26:19 AM	BCl3 valve closed
4/1/2010	8:26:19 AM	PH3 valve closed
4/1/2010	8:26:19 AM	SiCl4 pre valve closed
4/1/2010	8:26:19 AM	SiCl4 post valve closed
4/1/2010	8:26:19 AM	Main Vac valve closed
4/1/2010	8:26:19 AM	Bypass valve closed
4/1/2010	8:26:19 AM	H2 valve opened
4/1/2010	8:26:19 AM	Bubbler valve opened
4/1/2010	8:26:19 AM	Helium MFC set to  0.000000
4/1/2010	8:26:19 AM	H2 MFC set to  500.000000
4/1/2010	8:26:19 AM	BCl3 MFC set to  0.000000
4/1/2010	8:26:19 AM	SiCl4 MFC set to  0.000000
4/1/2010	8:26:19 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:26:19 AM	Tube furnace set to 1000
4/1/2010	8:46:19 AM	Helium valve closed
4/1/2010	8:46:19 AM	BCl3 valve closed
4/1/2010	8:46:19 AM	PH3 valve closed
4/1/2010	8:46:19 AM	Main Vac valve closed
4/1/2010	8:46:19 AM	Bypass valve closed
4/1/2010	8:46:19 AM	H2 valve opened
4/1/2010	8:46:19 AM	SiCl4 pre valve opened
4/1/2010	8:46:19 AM	SiCl4 post valve opened
4/1/2010	8:46:19 AM	Bubbler valve opened
4/1/2010	8:46:19 AM	Helium MFC set to  0.000000
4/1/2010	8:46:19 AM	H2 MFC set to  500.000000
4/1/2010	8:46:19 AM	BCl3 MFC set to  0.000000
4/1/2010	8:46:19 AM	SiCl4 MFC set to  325.000000
4/1/2010	8:46:19 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:46:19 AM	Tube furnace set to 1000
4/1/2010	9:06:19 AM	Helium valve closed
4/1/2010	9:06:19 AM	BCl3 valve closed
4/1/2010	9:06:19 AM	PH3 valve closed
4/1/2010	9:06:19 AM	SiCl4 pre valve closed
4/1/2010	9:06:19 AM	SiCl4 post valve closed
4/1/2010	9:06:19 AM	Main Vac valve closed
4/1/2010	9:06:19 AM	Bypass valve closed
4/1/2010	9:06:19 AM	H2 valve opened
4/1/2010	9:06:19 AM	Bubbler valve opened
4/1/2010	9:06:19 AM	Helium MFC set to  0.000000
4/1/2010	9:06:19 AM	H2 MFC set to  500.000000
4/1/2010	9:06:19 AM	BCl3 MFC set to  0.000000
4/1/2010	9:06:19 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:06:19 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:06:19 AM	Tube furnace set to 750
4/1/2010	9:26:19 AM	H2 valve closed
4/1/2010	9:26:19 AM	BCl3 valve closed
4/1/2010	9:26:19 AM	PH3 valve closed
4/1/2010	9:26:19 AM	SiCl4 pre valve closed
4/1/2010	9:26:19 AM	SiCl4 post valve closed
4/1/2010	9:26:19 AM	Main Vac valve closed
4/1/2010	9:26:19 AM	Bypass valve closed
4/1/2010	9:26:19 AM	Helium valve opened
4/1/2010	9:26:19 AM	Bubbler valve opened
4/1/2010	9:26:19 AM	Helium MFC set to  500.000000
4/1/2010	9:26:19 AM	H2 MFC set to  0.000000
4/1/2010	9:26:19 AM	BCl3 MFC set to  0.000000
4/1/2010	9:26:19 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:26:19 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:26:19 AM	Tube furnace set to 0
4/1/2010	9:32:42 AM	Helium valve closed
4/1/2010	9:32:42 AM	H2 valve closed
4/1/2010	9:32:42 AM	BCl3 valve closed
4/1/2010	9:32:42 AM	PH3 valve closed
4/1/2010	9:32:42 AM	SiCl4 pre valve closed
4/1/2010	9:32:42 AM	SiCl4 post valve closed
4/1/2010	9:32:42 AM	Main Vac valve closed
4/1/2010	9:32:42 AM	Bypass valve closed
4/1/2010	9:32:42 AM	Bubbler valve closed
4/1/2010	9:32:42 AM	Helium MFC set to  0.000000
4/1/2010	9:32:42 AM	H2 MFC set to  0.000000
4/1/2010	9:32:42 AM	BCl3 MFC set to  0.000000
4/1/2010	9:32:42 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:32:42 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:32:42 AM	Tube furnace set to 0
4/1/2010	9:32:42 AM	Run finished at 9:32 AM
4/1/2010	9:44:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	9:44:37 AM	Recipe started at 9:44 AM
4/1/2010	9:44:37 AM	Helium valve closed
4/1/2010	9:44:37 AM	H2 valve closed
4/1/2010	9:44:37 AM	BCl3 valve closed
4/1/2010	9:44:37 AM	PH3 valve closed
4/1/2010	9:44:37 AM	SiCl4 pre valve closed
4/1/2010	9:44:37 AM	SiCl4 post valve closed
4/1/2010	9:44:37 AM	Main Vac valve closed
4/1/2010	9:44:37 AM	Bubbler valve closed
4/1/2010	9:44:37 AM	Bypass valve opened
4/1/2010	9:44:37 AM	Helium MFC set to  0.000000
4/1/2010	9:44:37 AM	H2 MFC set to  0.000000
4/1/2010	9:44:37 AM	BCl3 MFC set to  0.000000
4/1/2010	9:44:37 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:44:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:44:38 AM	Tube furnace set to 0
4/1/2010	9:45:09 AM	Helium valve closed
4/1/2010	9:45:09 AM	H2 valve closed
4/1/2010	9:45:09 AM	BCl3 valve closed
4/1/2010	9:45:09 AM	PH3 valve closed
4/1/2010	9:45:09 AM	SiCl4 pre valve closed
4/1/2010	9:45:09 AM	SiCl4 post valve closed
4/1/2010	9:45:09 AM	Bubbler valve closed
4/1/2010	9:45:09 AM	Main Vac valve opened
4/1/2010	9:45:09 AM	Bypass valve opened
4/1/2010	9:45:09 AM	Helium MFC set to  0.000000
4/1/2010	9:45:09 AM	H2 MFC set to  0.000000
4/1/2010	9:45:09 AM	BCl3 MFC set to  0.000000
4/1/2010	9:45:09 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:45:09 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:45:09 AM	Tube furnace set to 0
4/1/2010	9:45:09 AM	Run finished at 9:45 AM
4/1/2010	9:45:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	9:50:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	9:50:32 AM	Recipe started at 9:50 AM
4/1/2010	9:50:32 AM	H2 valve closed
4/1/2010	9:50:32 AM	BCl3 valve closed
4/1/2010	9:50:32 AM	PH3 valve closed
4/1/2010	9:50:32 AM	SiCl4 pre valve closed
4/1/2010	9:50:32 AM	SiCl4 post valve closed
4/1/2010	9:50:32 AM	Main Vac valve closed
4/1/2010	9:50:32 AM	Bypass valve closed
4/1/2010	9:50:32 AM	Bubbler valve closed
4/1/2010	9:50:32 AM	Helium valve opened
4/1/2010	9:50:32 AM	Helium MFC set to  500.000000
4/1/2010	9:50:32 AM	H2 MFC set to  0.000000
4/1/2010	9:50:32 AM	BCl3 MFC set to  0.000000
4/1/2010	9:50:33 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:50:33 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:50:33 AM	Tube furnace set to 0
4/1/2010	9:51:53 AM	Helium valve closed
4/1/2010	9:51:53 AM	H2 valve closed
4/1/2010	9:51:53 AM	BCl3 valve closed
4/1/2010	9:51:53 AM	PH3 valve closed
4/1/2010	9:51:53 AM	SiCl4 pre valve closed
4/1/2010	9:51:53 AM	SiCl4 post valve closed
4/1/2010	9:51:53 AM	Main Vac valve closed
4/1/2010	9:51:53 AM	Bypass valve closed
4/1/2010	9:51:53 AM	Bubbler valve closed
4/1/2010	9:51:53 AM	Helium MFC set to  0.000000
4/1/2010	9:51:53 AM	H2 MFC set to  0.000000
4/1/2010	9:51:53 AM	BCl3 MFC set to  0.000000
4/1/2010	9:51:53 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:51:53 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:51:53 AM	Tube furnace set to 0
4/1/2010	9:52:08 AM	Helium valve closed
4/1/2010	9:52:08 AM	H2 valve closed
4/1/2010	9:52:08 AM	BCl3 valve closed
4/1/2010	9:52:08 AM	PH3 valve closed
4/1/2010	9:52:08 AM	SiCl4 pre valve closed
4/1/2010	9:52:08 AM	SiCl4 post valve closed
4/1/2010	9:52:08 AM	Main Vac valve closed
4/1/2010	9:52:08 AM	Bubbler valve closed
4/1/2010	9:52:08 AM	Bypass valve opened
4/1/2010	9:52:08 AM	Helium MFC set to  0.000000
4/1/2010	9:52:08 AM	H2 MFC set to  0.000000
4/1/2010	9:52:08 AM	BCl3 MFC set to  0.000000
4/1/2010	9:52:08 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:52:08 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:52:09 AM	Tube furnace set to 0
4/1/2010	9:52:30 AM	Helium valve closed
4/1/2010	9:52:30 AM	H2 valve closed
4/1/2010	9:52:30 AM	BCl3 valve closed
4/1/2010	9:52:30 AM	PH3 valve closed
4/1/2010	9:52:30 AM	SiCl4 pre valve closed
4/1/2010	9:52:30 AM	SiCl4 post valve closed
4/1/2010	9:52:30 AM	Bubbler valve closed
4/1/2010	9:52:30 AM	Main Vac valve opened
4/1/2010	9:52:30 AM	Bypass valve opened
4/1/2010	9:52:30 AM	Helium MFC set to  0.000000
4/1/2010	9:52:30 AM	H2 MFC set to  0.000000
4/1/2010	9:52:30 AM	BCl3 MFC set to  0.000000
4/1/2010	9:52:30 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:52:30 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:52:30 AM	Tube furnace set to 0
4/1/2010	9:57:30 AM	H2 valve closed
4/1/2010	9:57:30 AM	BCl3 valve closed
4/1/2010	9:57:30 AM	PH3 valve closed
4/1/2010	9:57:30 AM	SiCl4 pre valve closed
4/1/2010	9:57:30 AM	SiCl4 post valve closed
4/1/2010	9:57:30 AM	Main Vac valve closed
4/1/2010	9:57:30 AM	Bypass valve closed
4/1/2010	9:57:30 AM	Bubbler valve closed
4/1/2010	9:57:30 AM	Helium valve opened
4/1/2010	9:57:30 AM	Helium MFC set to  500.000000
4/1/2010	9:57:30 AM	H2 MFC set to  0.000000
4/1/2010	9:57:30 AM	BCl3 MFC set to  0.000000
4/1/2010	9:57:30 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:57:30 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:57:31 AM	Tube furnace set to 0
4/1/2010	9:58:52 AM	Helium valve closed
4/1/2010	9:58:52 AM	H2 valve closed
4/1/2010	9:58:52 AM	BCl3 valve closed
4/1/2010	9:58:52 AM	PH3 valve closed
4/1/2010	9:58:52 AM	SiCl4 pre valve closed
4/1/2010	9:58:52 AM	SiCl4 post valve closed
4/1/2010	9:58:52 AM	Main Vac valve closed
4/1/2010	9:58:52 AM	Bypass valve closed
4/1/2010	9:58:52 AM	Bubbler valve closed
4/1/2010	9:58:52 AM	Helium MFC set to  0.000000
4/1/2010	9:58:52 AM	H2 MFC set to  0.000000
4/1/2010	9:58:52 AM	BCl3 MFC set to  0.000000
4/1/2010	9:58:52 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:58:52 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:58:52 AM	Tube furnace set to 0
4/1/2010	9:59:07 AM	Helium valve closed
4/1/2010	9:59:07 AM	H2 valve closed
4/1/2010	9:59:07 AM	BCl3 valve closed
4/1/2010	9:59:07 AM	PH3 valve closed
4/1/2010	9:59:07 AM	SiCl4 pre valve closed
4/1/2010	9:59:07 AM	SiCl4 post valve closed
4/1/2010	9:59:07 AM	Main Vac valve closed
4/1/2010	9:59:07 AM	Bubbler valve closed
4/1/2010	9:59:07 AM	Bypass valve opened
4/1/2010	9:59:07 AM	Helium MFC set to  0.000000
4/1/2010	9:59:07 AM	H2 MFC set to  0.000000
4/1/2010	9:59:07 AM	BCl3 MFC set to  0.000000
4/1/2010	9:59:07 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:59:07 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:59:07 AM	Tube furnace set to 0
4/1/2010	9:59:29 AM	Helium valve closed
4/1/2010	9:59:29 AM	H2 valve closed
4/1/2010	9:59:29 AM	BCl3 valve closed
4/1/2010	9:59:29 AM	PH3 valve closed
4/1/2010	9:59:29 AM	SiCl4 pre valve closed
4/1/2010	9:59:29 AM	SiCl4 post valve closed
4/1/2010	9:59:29 AM	Bubbler valve closed
4/1/2010	9:59:29 AM	Main Vac valve opened
4/1/2010	9:59:29 AM	Bypass valve opened
4/1/2010	9:59:29 AM	Helium MFC set to  0.000000
4/1/2010	9:59:29 AM	H2 MFC set to  0.000000
4/1/2010	9:59:29 AM	BCl3 MFC set to  0.000000
4/1/2010	9:59:29 AM	SiCl4 MFC set to  0.000000
4/1/2010	9:59:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:59:29 AM	Tube furnace set to 0
4/1/2010	10:04:29 AM	H2 valve closed
4/1/2010	10:04:29 AM	BCl3 valve closed
4/1/2010	10:04:29 AM	PH3 valve closed
4/1/2010	10:04:29 AM	SiCl4 pre valve closed
4/1/2010	10:04:29 AM	SiCl4 post valve closed
4/1/2010	10:04:29 AM	Main Vac valve closed
4/1/2010	10:04:29 AM	Bypass valve closed
4/1/2010	10:04:29 AM	Bubbler valve closed
4/1/2010	10:04:29 AM	Helium valve opened
4/1/2010	10:04:29 AM	Helium MFC set to  500.000000
4/1/2010	10:04:29 AM	H2 MFC set to  0.000000
4/1/2010	10:04:29 AM	BCl3 MFC set to  0.000000
4/1/2010	10:04:29 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:04:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:04:29 AM	Tube furnace set to 0
4/1/2010	10:05:50 AM	Helium valve closed
4/1/2010	10:05:50 AM	H2 valve closed
4/1/2010	10:05:50 AM	BCl3 valve closed
4/1/2010	10:05:50 AM	PH3 valve closed
4/1/2010	10:05:50 AM	SiCl4 pre valve closed
4/1/2010	10:05:50 AM	SiCl4 post valve closed
4/1/2010	10:05:50 AM	Main Vac valve closed
4/1/2010	10:05:50 AM	Bypass valve closed
4/1/2010	10:05:50 AM	Bubbler valve closed
4/1/2010	10:05:50 AM	Helium MFC set to  0.000000
4/1/2010	10:05:50 AM	H2 MFC set to  0.000000
4/1/2010	10:05:50 AM	BCl3 MFC set to  0.000000
4/1/2010	10:05:50 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:05:50 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:05:51 AM	Tube furnace set to 0
4/1/2010	10:06:06 AM	Helium valve closed
4/1/2010	10:06:06 AM	H2 valve closed
4/1/2010	10:06:06 AM	BCl3 valve closed
4/1/2010	10:06:06 AM	PH3 valve closed
4/1/2010	10:06:06 AM	SiCl4 pre valve closed
4/1/2010	10:06:06 AM	SiCl4 post valve closed
4/1/2010	10:06:06 AM	Main Vac valve closed
4/1/2010	10:06:06 AM	Bubbler valve closed
4/1/2010	10:06:06 AM	Bypass valve opened
4/1/2010	10:06:06 AM	Helium MFC set to  0.000000
4/1/2010	10:06:06 AM	H2 MFC set to  0.000000
4/1/2010	10:06:06 AM	BCl3 MFC set to  0.000000
4/1/2010	10:06:06 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:06:06 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:06:06 AM	Tube furnace set to 0
4/1/2010	10:06:28 AM	Helium valve closed
4/1/2010	10:06:28 AM	H2 valve closed
4/1/2010	10:06:28 AM	BCl3 valve closed
4/1/2010	10:06:28 AM	PH3 valve closed
4/1/2010	10:06:28 AM	SiCl4 pre valve closed
4/1/2010	10:06:28 AM	SiCl4 post valve closed
4/1/2010	10:06:28 AM	Bubbler valve closed
4/1/2010	10:06:28 AM	Main Vac valve opened
4/1/2010	10:06:28 AM	Bypass valve opened
4/1/2010	10:06:28 AM	Helium MFC set to  0.000000
4/1/2010	10:06:28 AM	H2 MFC set to  0.000000
4/1/2010	10:06:28 AM	BCl3 MFC set to  0.000000
4/1/2010	10:06:28 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:06:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:06:28 AM	Tube furnace set to 0
4/1/2010	10:11:28 AM	Helium valve closed
4/1/2010	10:11:28 AM	H2 valve closed
4/1/2010	10:11:28 AM	BCl3 valve closed
4/1/2010	10:11:28 AM	PH3 valve closed
4/1/2010	10:11:28 AM	SiCl4 pre valve closed
4/1/2010	10:11:28 AM	SiCl4 post valve closed
4/1/2010	10:11:28 AM	Bubbler valve closed
4/1/2010	10:11:28 AM	Main Vac valve opened
4/1/2010	10:11:28 AM	Bypass valve opened
4/1/2010	10:11:28 AM	Helium MFC set to  0.000000
4/1/2010	10:11:28 AM	H2 MFC set to  0.000000
4/1/2010	10:11:28 AM	BCl3 MFC set to  0.000000
4/1/2010	10:11:28 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:11:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:11:28 AM	Tube furnace set to 0
4/1/2010	10:11:29 AM	Run finished at 10:11 AM
4/1/2010	10:11:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	10:29:15 AM	Main Vac valve closed
4/1/2010	10:29:16 AM	Bypass valve closed
4/1/2010	10:29:29 AM	Main Vac valve opened
4/1/2010	10:29:30 AM	Bypass valve opened
4/1/2010	10:29:56 AM	Recipe started at 10:29 AM
4/1/2010	10:29:56 AM	Helium valve closed
4/1/2010	10:29:56 AM	BCl3 valve closed
4/1/2010	10:29:56 AM	PH3 valve closed
4/1/2010	10:29:56 AM	SiCl4 pre valve closed
4/1/2010	10:29:56 AM	SiCl4 post valve closed
4/1/2010	10:29:56 AM	Main Vac valve closed
4/1/2010	10:29:56 AM	Bypass valve closed
4/1/2010	10:29:56 AM	Bubbler valve closed
4/1/2010	10:29:56 AM	H2 valve opened
4/1/2010	10:29:56 AM	Helium MFC set to  0.000000
4/1/2010	10:29:56 AM	H2 MFC set to  500.000000
4/1/2010	10:29:56 AM	BCl3 MFC set to  0.000000
4/1/2010	10:29:56 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:29:56 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:29:56 AM	Tube furnace set to 1000
4/1/2010	10:31:17 AM	Helium valve closed
4/1/2010	10:31:17 AM	BCl3 valve closed
4/1/2010	10:31:17 AM	PH3 valve closed
4/1/2010	10:31:17 AM	SiCl4 pre valve closed
4/1/2010	10:31:17 AM	SiCl4 post valve closed
4/1/2010	10:31:17 AM	Main Vac valve closed
4/1/2010	10:31:17 AM	Bypass valve closed
4/1/2010	10:31:17 AM	H2 valve opened
4/1/2010	10:31:17 AM	Bubbler valve opened
4/1/2010	10:31:17 AM	Helium MFC set to  0.000000
4/1/2010	10:31:17 AM	H2 MFC set to  500.000000
4/1/2010	10:31:17 AM	BCl3 MFC set to  0.000000
4/1/2010	10:31:17 AM	SiCl4 MFC set to  0.000000
4/1/2010	10:31:17 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:31:17 AM	Tube furnace set to 1000
4/1/2010	10:51:17 AM	Helium valve closed
4/1/2010	10:51:17 AM	BCl3 valve closed
4/1/2010	10:51:17 AM	PH3 valve closed
4/1/2010	10:51:17 AM	Main Vac valve closed
4/1/2010	10:51:17 AM	Bypass valve closed
4/1/2010	10:51:17 AM	H2 valve opened
4/1/2010	10:51:17 AM	SiCl4 pre valve opened
4/1/2010	10:51:17 AM	SiCl4 post valve opened
4/1/2010	10:51:17 AM	Bubbler valve opened
4/1/2010	10:51:17 AM	Helium MFC set to  0.000000
4/1/2010	10:51:17 AM	H2 MFC set to  500.000000
4/1/2010	10:51:17 AM	BCl3 MFC set to  0.000000
4/1/2010	10:51:17 AM	SiCl4 MFC set to  325.000000
4/1/2010	10:51:17 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:51:17 AM	Tube furnace set to 1000
4/1/2010	11:11:17 AM	Helium valve closed
4/1/2010	11:11:17 AM	BCl3 valve closed
4/1/2010	11:11:17 AM	PH3 valve closed
4/1/2010	11:11:17 AM	SiCl4 pre valve closed
4/1/2010	11:11:17 AM	SiCl4 post valve closed
4/1/2010	11:11:17 AM	Main Vac valve closed
4/1/2010	11:11:17 AM	Bypass valve closed
4/1/2010	11:11:17 AM	H2 valve opened
4/1/2010	11:11:17 AM	Bubbler valve opened
4/1/2010	11:11:17 AM	Helium MFC set to  0.000000
4/1/2010	11:11:17 AM	H2 MFC set to  500.000000
4/1/2010	11:11:17 AM	BCl3 MFC set to  0.000000
4/1/2010	11:11:17 AM	SiCl4 MFC set to  0.000000
4/1/2010	11:11:17 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:11:17 AM	Tube furnace set to 750
4/1/2010	11:31:17 AM	H2 valve closed
4/1/2010	11:31:17 AM	BCl3 valve closed
4/1/2010	11:31:17 AM	PH3 valve closed
4/1/2010	11:31:17 AM	SiCl4 pre valve closed
4/1/2010	11:31:17 AM	SiCl4 post valve closed
4/1/2010	11:31:17 AM	Main Vac valve closed
4/1/2010	11:31:17 AM	Bypass valve closed
4/1/2010	11:31:17 AM	Helium valve opened
4/1/2010	11:31:17 AM	Bubbler valve opened
4/1/2010	11:31:17 AM	Helium MFC set to  500.000000
4/1/2010	11:31:17 AM	H2 MFC set to  0.000000
4/1/2010	11:31:17 AM	BCl3 MFC set to  0.000000
4/1/2010	11:31:17 AM	SiCl4 MFC set to  0.000000
4/1/2010	11:31:17 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:31:17 AM	Tube furnace set to 0
4/1/2010	11:44:06 AM	Helium valve closed
4/1/2010	11:44:06 AM	H2 valve closed
4/1/2010	11:44:06 AM	BCl3 valve closed
4/1/2010	11:44:06 AM	PH3 valve closed
4/1/2010	11:44:06 AM	SiCl4 pre valve closed
4/1/2010	11:44:06 AM	SiCl4 post valve closed
4/1/2010	11:44:06 AM	Main Vac valve closed
4/1/2010	11:44:06 AM	Bypass valve closed
4/1/2010	11:44:06 AM	Bubbler valve closed
4/1/2010	11:44:06 AM	Helium MFC set to  0.000000
4/1/2010	11:44:06 AM	H2 MFC set to  0.000000
4/1/2010	11:44:06 AM	BCl3 MFC set to  0.000000
4/1/2010	11:44:06 AM	SiCl4 MFC set to  0.000000
4/1/2010	11:44:06 AM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:44:06 AM	Tube furnace set to 0
4/1/2010	11:44:06 AM	Run finished at 11:44 AM
4/1/2010	12:03:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	12:03:31 PM	Recipe started at 12:03 PM
4/1/2010	12:03:31 PM	Helium valve closed
4/1/2010	12:03:31 PM	H2 valve closed
4/1/2010	12:03:31 PM	BCl3 valve closed
4/1/2010	12:03:31 PM	PH3 valve closed
4/1/2010	12:03:31 PM	SiCl4 pre valve closed
4/1/2010	12:03:31 PM	SiCl4 post valve closed
4/1/2010	12:03:31 PM	Main Vac valve closed
4/1/2010	12:03:31 PM	Bubbler valve closed
4/1/2010	12:03:31 PM	Bypass valve opened
4/1/2010	12:03:31 PM	Helium MFC set to  0.000000
4/1/2010	12:03:31 PM	H2 MFC set to  0.000000
4/1/2010	12:03:31 PM	BCl3 MFC set to  0.000000
4/1/2010	12:03:31 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:03:31 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:03:32 PM	Tube furnace set to 0
4/1/2010	12:04:03 PM	Helium valve closed
4/1/2010	12:04:03 PM	H2 valve closed
4/1/2010	12:04:03 PM	BCl3 valve closed
4/1/2010	12:04:03 PM	PH3 valve closed
4/1/2010	12:04:03 PM	SiCl4 pre valve closed
4/1/2010	12:04:03 PM	SiCl4 post valve closed
4/1/2010	12:04:03 PM	Bubbler valve closed
4/1/2010	12:04:03 PM	Main Vac valve opened
4/1/2010	12:04:03 PM	Bypass valve opened
4/1/2010	12:04:03 PM	Helium MFC set to  0.000000
4/1/2010	12:04:03 PM	H2 MFC set to  0.000000
4/1/2010	12:04:03 PM	BCl3 MFC set to  0.000000
4/1/2010	12:04:03 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:04:03 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:04:03 PM	Tube furnace set to 0
4/1/2010	12:04:04 PM	Run finished at 12:04 PM
4/1/2010	12:04:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	12:14:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	12:14:40 PM	Recipe started at 12:14 PM
4/1/2010	12:14:40 PM	H2 valve closed
4/1/2010	12:14:40 PM	BCl3 valve closed
4/1/2010	12:14:40 PM	PH3 valve closed
4/1/2010	12:14:40 PM	SiCl4 pre valve closed
4/1/2010	12:14:40 PM	SiCl4 post valve closed
4/1/2010	12:14:40 PM	Main Vac valve closed
4/1/2010	12:14:40 PM	Bypass valve closed
4/1/2010	12:14:40 PM	Bubbler valve closed
4/1/2010	12:14:40 PM	Helium valve opened
4/1/2010	12:14:40 PM	Helium MFC set to  500.000000
4/1/2010	12:14:40 PM	H2 MFC set to  0.000000
4/1/2010	12:14:40 PM	BCl3 MFC set to  0.000000
4/1/2010	12:14:40 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:14:40 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:14:40 PM	Tube furnace set to 0
4/1/2010	12:16:01 PM	Helium valve closed
4/1/2010	12:16:01 PM	H2 valve closed
4/1/2010	12:16:01 PM	BCl3 valve closed
4/1/2010	12:16:01 PM	PH3 valve closed
4/1/2010	12:16:01 PM	SiCl4 pre valve closed
4/1/2010	12:16:01 PM	SiCl4 post valve closed
4/1/2010	12:16:01 PM	Main Vac valve closed
4/1/2010	12:16:01 PM	Bypass valve closed
4/1/2010	12:16:01 PM	Bubbler valve closed
4/1/2010	12:16:01 PM	Helium MFC set to  0.000000
4/1/2010	12:16:01 PM	H2 MFC set to  0.000000
4/1/2010	12:16:01 PM	BCl3 MFC set to  0.000000
4/1/2010	12:16:01 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:16:01 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:16:01 PM	Tube furnace set to 0
4/1/2010	12:16:16 PM	Helium valve closed
4/1/2010	12:16:16 PM	H2 valve closed
4/1/2010	12:16:16 PM	BCl3 valve closed
4/1/2010	12:16:16 PM	PH3 valve closed
4/1/2010	12:16:16 PM	SiCl4 pre valve closed
4/1/2010	12:16:16 PM	SiCl4 post valve closed
4/1/2010	12:16:16 PM	Main Vac valve closed
4/1/2010	12:16:16 PM	Bubbler valve closed
4/1/2010	12:16:16 PM	Bypass valve opened
4/1/2010	12:16:16 PM	Helium MFC set to  0.000000
4/1/2010	12:16:16 PM	H2 MFC set to  0.000000
4/1/2010	12:16:16 PM	BCl3 MFC set to  0.000000
4/1/2010	12:16:16 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:16:16 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:16:16 PM	Tube furnace set to 0
4/1/2010	12:16:38 PM	Helium valve closed
4/1/2010	12:16:38 PM	H2 valve closed
4/1/2010	12:16:38 PM	BCl3 valve closed
4/1/2010	12:16:38 PM	PH3 valve closed
4/1/2010	12:16:38 PM	SiCl4 pre valve closed
4/1/2010	12:16:38 PM	SiCl4 post valve closed
4/1/2010	12:16:38 PM	Bubbler valve closed
4/1/2010	12:16:38 PM	Main Vac valve opened
4/1/2010	12:16:38 PM	Bypass valve opened
4/1/2010	12:16:38 PM	Helium MFC set to  0.000000
4/1/2010	12:16:38 PM	H2 MFC set to  0.000000
4/1/2010	12:16:38 PM	BCl3 MFC set to  0.000000
4/1/2010	12:16:38 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:16:38 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:16:38 PM	Tube furnace set to 0
4/1/2010	12:21:38 PM	H2 valve closed
4/1/2010	12:21:38 PM	BCl3 valve closed
4/1/2010	12:21:38 PM	PH3 valve closed
4/1/2010	12:21:38 PM	SiCl4 pre valve closed
4/1/2010	12:21:38 PM	SiCl4 post valve closed
4/1/2010	12:21:38 PM	Main Vac valve closed
4/1/2010	12:21:38 PM	Bypass valve closed
4/1/2010	12:21:38 PM	Bubbler valve closed
4/1/2010	12:21:38 PM	Helium valve opened
4/1/2010	12:21:38 PM	Helium MFC set to  500.000000
4/1/2010	12:21:38 PM	H2 MFC set to  0.000000
4/1/2010	12:21:38 PM	BCl3 MFC set to  0.000000
4/1/2010	12:21:38 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:21:38 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:21:39 PM	Tube furnace set to 0
4/1/2010	12:22:59 PM	Helium valve closed
4/1/2010	12:22:59 PM	H2 valve closed
4/1/2010	12:22:59 PM	BCl3 valve closed
4/1/2010	12:22:59 PM	PH3 valve closed
4/1/2010	12:22:59 PM	SiCl4 pre valve closed
4/1/2010	12:22:59 PM	SiCl4 post valve closed
4/1/2010	12:22:59 PM	Main Vac valve closed
4/1/2010	12:22:59 PM	Bypass valve closed
4/1/2010	12:22:59 PM	Bubbler valve closed
4/1/2010	12:22:59 PM	Helium MFC set to  0.000000
4/1/2010	12:22:59 PM	H2 MFC set to  0.000000
4/1/2010	12:22:59 PM	BCl3 MFC set to  0.000000
4/1/2010	12:22:59 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:22:59 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:22:59 PM	Tube furnace set to 0
4/1/2010	12:23:14 PM	Helium valve closed
4/1/2010	12:23:14 PM	H2 valve closed
4/1/2010	12:23:14 PM	BCl3 valve closed
4/1/2010	12:23:14 PM	PH3 valve closed
4/1/2010	12:23:14 PM	SiCl4 pre valve closed
4/1/2010	12:23:14 PM	SiCl4 post valve closed
4/1/2010	12:23:14 PM	Main Vac valve closed
4/1/2010	12:23:14 PM	Bubbler valve closed
4/1/2010	12:23:14 PM	Bypass valve opened
4/1/2010	12:23:14 PM	Helium MFC set to  0.000000
4/1/2010	12:23:14 PM	H2 MFC set to  0.000000
4/1/2010	12:23:14 PM	BCl3 MFC set to  0.000000
4/1/2010	12:23:14 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:23:14 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:23:14 PM	Tube furnace set to 0
4/1/2010	12:23:35 PM	Helium valve closed
4/1/2010	12:23:35 PM	H2 valve closed
4/1/2010	12:23:35 PM	BCl3 valve closed
4/1/2010	12:23:35 PM	PH3 valve closed
4/1/2010	12:23:35 PM	SiCl4 pre valve closed
4/1/2010	12:23:35 PM	SiCl4 post valve closed
4/1/2010	12:23:35 PM	Bubbler valve closed
4/1/2010	12:23:35 PM	Main Vac valve opened
4/1/2010	12:23:35 PM	Bypass valve opened
4/1/2010	12:23:35 PM	Helium MFC set to  0.000000
4/1/2010	12:23:35 PM	H2 MFC set to  0.000000
4/1/2010	12:23:35 PM	BCl3 MFC set to  0.000000
4/1/2010	12:23:35 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:23:35 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:23:36 PM	Tube furnace set to 0
4/1/2010	12:24:06 PM	Run aborted at 12:24 PM
4/1/2010	12:24:06 PM	Helium valve closed
4/1/2010	12:24:06 PM	H2 valve closed
4/1/2010	12:24:06 PM	BCl3 valve closed
4/1/2010	12:24:06 PM	PH3 valve closed
4/1/2010	12:24:06 PM	SiCl4 pre valve closed
4/1/2010	12:24:06 PM	SiCl4 post valve closed
4/1/2010	12:24:06 PM	Bypass valve closed
4/1/2010	12:24:06 PM	Main Vac valve closed
4/1/2010	12:24:06 PM	Bubbler valve closed
4/1/2010	12:24:06 PM	Helium MFC set to  0.000000
4/1/2010	12:24:06 PM	H2 MFC set to  0.000000
4/1/2010	12:24:06 PM	BCl3 MFC set to  0.000000
4/1/2010	12:24:06 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:24:06 PM	Tube furnace set to 0
4/1/2010	12:24:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	12:24:09 PM	Main Vac valve closed
4/1/2010	12:24:12 PM	Main Vac valve opened
4/1/2010	12:24:12 PM	Bypass valve closed
4/1/2010	12:24:13 PM	Bypass valve opened
4/1/2010	12:25:33 PM	Main Vac valve closed
4/1/2010	12:25:33 PM	Bypass valve closed
4/1/2010	12:25:48 PM	Main Vac valve opened
4/1/2010	12:25:49 PM	Bypass valve opened
4/1/2010	12:26:34 PM	Recipe started at 12:26 PM
4/1/2010	12:26:34 PM	Helium valve closed
4/1/2010	12:26:34 PM	BCl3 valve closed
4/1/2010	12:26:34 PM	PH3 valve closed
4/1/2010	12:26:34 PM	SiCl4 pre valve closed
4/1/2010	12:26:34 PM	SiCl4 post valve closed
4/1/2010	12:26:34 PM	Main Vac valve closed
4/1/2010	12:26:34 PM	Bypass valve closed
4/1/2010	12:26:34 PM	Bubbler valve closed
4/1/2010	12:26:34 PM	H2 valve opened
4/1/2010	12:26:34 PM	Helium MFC set to  0.000000
4/1/2010	12:26:34 PM	H2 MFC set to  500.000000
4/1/2010	12:26:34 PM	BCl3 MFC set to  0.000000
4/1/2010	12:26:34 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:26:34 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:26:34 PM	Tube furnace set to 1000
4/1/2010	12:27:53 PM	Helium valve closed
4/1/2010	12:27:53 PM	BCl3 valve closed
4/1/2010	12:27:53 PM	PH3 valve closed
4/1/2010	12:27:53 PM	SiCl4 pre valve closed
4/1/2010	12:27:53 PM	SiCl4 post valve closed
4/1/2010	12:27:53 PM	Main Vac valve closed
4/1/2010	12:27:53 PM	Bypass valve closed
4/1/2010	12:27:53 PM	H2 valve opened
4/1/2010	12:27:53 PM	Bubbler valve opened
4/1/2010	12:27:53 PM	Helium MFC set to  0.000000
4/1/2010	12:27:53 PM	H2 MFC set to  500.000000
4/1/2010	12:27:53 PM	BCl3 MFC set to  0.000000
4/1/2010	12:27:53 PM	SiCl4 MFC set to  0.000000
4/1/2010	12:27:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:27:53 PM	Tube furnace set to 1000
4/1/2010	12:47:53 PM	Helium valve closed
4/1/2010	12:47:53 PM	BCl3 valve closed
4/1/2010	12:47:53 PM	PH3 valve closed
4/1/2010	12:47:53 PM	Main Vac valve closed
4/1/2010	12:47:53 PM	Bypass valve closed
4/1/2010	12:47:53 PM	H2 valve opened
4/1/2010	12:47:53 PM	SiCl4 pre valve opened
4/1/2010	12:47:53 PM	SiCl4 post valve opened
4/1/2010	12:47:53 PM	Bubbler valve opened
4/1/2010	12:47:53 PM	Helium MFC set to  0.000000
4/1/2010	12:47:53 PM	H2 MFC set to  500.000000
4/1/2010	12:47:53 PM	BCl3 MFC set to  0.000000
4/1/2010	12:47:53 PM	SiCl4 MFC set to  325.000000
4/1/2010	12:47:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	12:47:53 PM	Tube furnace set to 1000
4/1/2010	1:07:53 PM	Helium valve closed
4/1/2010	1:07:53 PM	BCl3 valve closed
4/1/2010	1:07:53 PM	PH3 valve closed
4/1/2010	1:07:53 PM	SiCl4 pre valve closed
4/1/2010	1:07:53 PM	SiCl4 post valve closed
4/1/2010	1:07:53 PM	Main Vac valve closed
4/1/2010	1:07:53 PM	Bypass valve closed
4/1/2010	1:07:53 PM	H2 valve opened
4/1/2010	1:07:53 PM	Bubbler valve opened
4/1/2010	1:07:53 PM	Helium MFC set to  0.000000
4/1/2010	1:07:53 PM	H2 MFC set to  500.000000
4/1/2010	1:07:53 PM	BCl3 MFC set to  0.000000
4/1/2010	1:07:53 PM	SiCl4 MFC set to  0.000000
4/1/2010	1:07:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	1:07:53 PM	Tube furnace set to 750
4/1/2010	1:27:53 PM	H2 valve closed
4/1/2010	1:27:53 PM	BCl3 valve closed
4/1/2010	1:27:53 PM	PH3 valve closed
4/1/2010	1:27:53 PM	SiCl4 pre valve closed
4/1/2010	1:27:53 PM	SiCl4 post valve closed
4/1/2010	1:27:53 PM	Main Vac valve closed
4/1/2010	1:27:53 PM	Bypass valve closed
4/1/2010	1:27:53 PM	Helium valve opened
4/1/2010	1:27:53 PM	Bubbler valve opened
4/1/2010	1:27:53 PM	Helium MFC set to  500.000000
4/1/2010	1:27:53 PM	H2 MFC set to  0.000000
4/1/2010	1:27:53 PM	BCl3 MFC set to  0.000000
4/1/2010	1:27:53 PM	SiCl4 MFC set to  0.000000
4/1/2010	1:27:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	1:27:53 PM	Tube furnace set to 0
4/1/2010	1:43:08 PM	Run aborted at 1:43 PM
4/1/2010	1:43:08 PM	Helium valve closed
4/1/2010	1:43:08 PM	H2 valve closed
4/1/2010	1:43:08 PM	BCl3 valve closed
4/1/2010	1:43:08 PM	PH3 valve closed
4/1/2010	1:43:08 PM	SiCl4 pre valve closed
4/1/2010	1:43:08 PM	SiCl4 post valve closed
4/1/2010	1:43:08 PM	Bypass valve closed
4/1/2010	1:43:08 PM	Main Vac valve closed
4/1/2010	1:43:08 PM	Bubbler valve closed
4/1/2010	1:43:08 PM	Helium MFC set to  0.000000
4/1/2010	1:43:08 PM	H2 MFC set to  0.000000
4/1/2010	1:43:08 PM	BCl3 MFC set to  0.000000
4/1/2010	1:43:08 PM	SiCl4 MFC set to  0.000000
4/1/2010	1:43:08 PM	Tube furnace set to 0
4/1/2010	1:58:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	1:58:40 PM	Recipe started at 1:58 PM
4/1/2010	1:58:40 PM	Helium valve closed
4/1/2010	1:58:40 PM	H2 valve closed
4/1/2010	1:58:40 PM	BCl3 valve closed
4/1/2010	1:58:40 PM	PH3 valve closed
4/1/2010	1:58:40 PM	SiCl4 pre valve closed
4/1/2010	1:58:40 PM	SiCl4 post valve closed
4/1/2010	1:58:40 PM	Main Vac valve closed
4/1/2010	1:58:40 PM	Bubbler valve closed
4/1/2010	1:58:40 PM	Bypass valve opened
4/1/2010	1:58:40 PM	Helium MFC set to  0.000000
4/1/2010	1:58:40 PM	H2 MFC set to  0.000000
4/1/2010	1:58:40 PM	BCl3 MFC set to  0.000000
4/1/2010	1:58:40 PM	SiCl4 MFC set to  0.000000
4/1/2010	1:58:40 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	1:58:40 PM	Tube furnace set to 0
4/1/2010	1:59:12 PM	Helium valve closed
4/1/2010	1:59:12 PM	H2 valve closed
4/1/2010	1:59:12 PM	BCl3 valve closed
4/1/2010	1:59:12 PM	PH3 valve closed
4/1/2010	1:59:12 PM	SiCl4 pre valve closed
4/1/2010	1:59:12 PM	SiCl4 post valve closed
4/1/2010	1:59:12 PM	Bubbler valve closed
4/1/2010	1:59:12 PM	Main Vac valve opened
4/1/2010	1:59:12 PM	Bypass valve opened
4/1/2010	1:59:12 PM	Helium MFC set to  0.000000
4/1/2010	1:59:12 PM	H2 MFC set to  0.000000
4/1/2010	1:59:12 PM	BCl3 MFC set to  0.000000
4/1/2010	1:59:12 PM	SiCl4 MFC set to  0.000000
4/1/2010	1:59:12 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	1:59:12 PM	Tube furnace set to 0
4/1/2010	1:59:12 PM	Run finished at 1:59 PM
4/1/2010	1:59:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	2:02:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	2:02:49 PM	Recipe started at 2:02 PM
4/1/2010	2:02:49 PM	H2 valve closed
4/1/2010	2:02:49 PM	BCl3 valve closed
4/1/2010	2:02:49 PM	PH3 valve closed
4/1/2010	2:02:49 PM	SiCl4 pre valve closed
4/1/2010	2:02:49 PM	SiCl4 post valve closed
4/1/2010	2:02:49 PM	Main Vac valve closed
4/1/2010	2:02:49 PM	Bypass valve closed
4/1/2010	2:02:49 PM	Bubbler valve closed
4/1/2010	2:02:49 PM	Helium valve opened
4/1/2010	2:02:49 PM	Helium MFC set to  500.000000
4/1/2010	2:02:49 PM	H2 MFC set to  0.000000
4/1/2010	2:02:49 PM	BCl3 MFC set to  0.000000
4/1/2010	2:02:49 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:02:49 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:02:49 PM	Tube furnace set to 0
4/1/2010	2:04:10 PM	Helium valve closed
4/1/2010	2:04:10 PM	H2 valve closed
4/1/2010	2:04:10 PM	BCl3 valve closed
4/1/2010	2:04:10 PM	PH3 valve closed
4/1/2010	2:04:10 PM	SiCl4 pre valve closed
4/1/2010	2:04:10 PM	SiCl4 post valve closed
4/1/2010	2:04:10 PM	Main Vac valve closed
4/1/2010	2:04:10 PM	Bypass valve closed
4/1/2010	2:04:10 PM	Bubbler valve closed
4/1/2010	2:04:10 PM	Helium MFC set to  0.000000
4/1/2010	2:04:10 PM	H2 MFC set to  0.000000
4/1/2010	2:04:10 PM	BCl3 MFC set to  0.000000
4/1/2010	2:04:10 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:04:10 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:04:10 PM	Tube furnace set to 0
4/1/2010	2:04:25 PM	Helium valve closed
4/1/2010	2:04:25 PM	H2 valve closed
4/1/2010	2:04:25 PM	BCl3 valve closed
4/1/2010	2:04:25 PM	PH3 valve closed
4/1/2010	2:04:25 PM	SiCl4 pre valve closed
4/1/2010	2:04:25 PM	SiCl4 post valve closed
4/1/2010	2:04:25 PM	Main Vac valve closed
4/1/2010	2:04:25 PM	Bubbler valve closed
4/1/2010	2:04:25 PM	Bypass valve opened
4/1/2010	2:04:25 PM	Helium MFC set to  0.000000
4/1/2010	2:04:25 PM	H2 MFC set to  0.000000
4/1/2010	2:04:25 PM	BCl3 MFC set to  0.000000
4/1/2010	2:04:25 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:04:25 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:04:25 PM	Tube furnace set to 0
4/1/2010	2:04:47 PM	Helium valve closed
4/1/2010	2:04:47 PM	H2 valve closed
4/1/2010	2:04:47 PM	BCl3 valve closed
4/1/2010	2:04:47 PM	PH3 valve closed
4/1/2010	2:04:47 PM	SiCl4 pre valve closed
4/1/2010	2:04:47 PM	SiCl4 post valve closed
4/1/2010	2:04:47 PM	Bubbler valve closed
4/1/2010	2:04:47 PM	Main Vac valve opened
4/1/2010	2:04:47 PM	Bypass valve opened
4/1/2010	2:04:47 PM	Helium MFC set to  0.000000
4/1/2010	2:04:47 PM	H2 MFC set to  0.000000
4/1/2010	2:04:47 PM	BCl3 MFC set to  0.000000
4/1/2010	2:04:47 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:04:47 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:04:47 PM	Tube furnace set to 0
4/1/2010	2:09:47 PM	H2 valve closed
4/1/2010	2:09:47 PM	BCl3 valve closed
4/1/2010	2:09:47 PM	PH3 valve closed
4/1/2010	2:09:47 PM	SiCl4 pre valve closed
4/1/2010	2:09:47 PM	SiCl4 post valve closed
4/1/2010	2:09:47 PM	Main Vac valve closed
4/1/2010	2:09:47 PM	Bypass valve closed
4/1/2010	2:09:47 PM	Bubbler valve closed
4/1/2010	2:09:47 PM	Helium valve opened
4/1/2010	2:09:47 PM	Helium MFC set to  500.000000
4/1/2010	2:09:47 PM	H2 MFC set to  0.000000
4/1/2010	2:09:47 PM	BCl3 MFC set to  0.000000
4/1/2010	2:09:47 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:09:47 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:09:48 PM	Tube furnace set to 0
4/1/2010	2:11:07 PM	Helium valve closed
4/1/2010	2:11:07 PM	H2 valve closed
4/1/2010	2:11:07 PM	BCl3 valve closed
4/1/2010	2:11:07 PM	PH3 valve closed
4/1/2010	2:11:07 PM	SiCl4 pre valve closed
4/1/2010	2:11:07 PM	SiCl4 post valve closed
4/1/2010	2:11:07 PM	Main Vac valve closed
4/1/2010	2:11:07 PM	Bypass valve closed
4/1/2010	2:11:07 PM	Bubbler valve closed
4/1/2010	2:11:07 PM	Helium MFC set to  0.000000
4/1/2010	2:11:07 PM	H2 MFC set to  0.000000
4/1/2010	2:11:07 PM	BCl3 MFC set to  0.000000
4/1/2010	2:11:07 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:11:07 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:11:07 PM	Tube furnace set to 0
4/1/2010	2:11:22 PM	Helium valve closed
4/1/2010	2:11:22 PM	H2 valve closed
4/1/2010	2:11:22 PM	BCl3 valve closed
4/1/2010	2:11:22 PM	PH3 valve closed
4/1/2010	2:11:22 PM	SiCl4 pre valve closed
4/1/2010	2:11:22 PM	SiCl4 post valve closed
4/1/2010	2:11:22 PM	Main Vac valve closed
4/1/2010	2:11:22 PM	Bubbler valve closed
4/1/2010	2:11:22 PM	Bypass valve opened
4/1/2010	2:11:22 PM	Helium MFC set to  0.000000
4/1/2010	2:11:22 PM	H2 MFC set to  0.000000
4/1/2010	2:11:22 PM	BCl3 MFC set to  0.000000
4/1/2010	2:11:22 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:11:22 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:11:22 PM	Tube furnace set to 0
4/1/2010	2:11:44 PM	Helium valve closed
4/1/2010	2:11:44 PM	H2 valve closed
4/1/2010	2:11:44 PM	BCl3 valve closed
4/1/2010	2:11:44 PM	PH3 valve closed
4/1/2010	2:11:44 PM	SiCl4 pre valve closed
4/1/2010	2:11:44 PM	SiCl4 post valve closed
4/1/2010	2:11:44 PM	Bubbler valve closed
4/1/2010	2:11:44 PM	Main Vac valve opened
4/1/2010	2:11:44 PM	Bypass valve opened
4/1/2010	2:11:44 PM	Helium MFC set to  0.000000
4/1/2010	2:11:44 PM	H2 MFC set to  0.000000
4/1/2010	2:11:44 PM	BCl3 MFC set to  0.000000
4/1/2010	2:11:44 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:11:44 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:11:44 PM	Tube furnace set to 0
4/1/2010	2:16:44 PM	H2 valve closed
4/1/2010	2:16:44 PM	BCl3 valve closed
4/1/2010	2:16:44 PM	PH3 valve closed
4/1/2010	2:16:44 PM	SiCl4 pre valve closed
4/1/2010	2:16:44 PM	SiCl4 post valve closed
4/1/2010	2:16:44 PM	Main Vac valve closed
4/1/2010	2:16:44 PM	Bypass valve closed
4/1/2010	2:16:44 PM	Bubbler valve closed
4/1/2010	2:16:44 PM	Helium valve opened
4/1/2010	2:16:44 PM	Helium MFC set to  500.000000
4/1/2010	2:16:44 PM	H2 MFC set to  0.000000
4/1/2010	2:16:44 PM	BCl3 MFC set to  0.000000
4/1/2010	2:16:44 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:16:44 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:16:44 PM	Tube furnace set to 0
4/1/2010	2:18:03 PM	Helium valve closed
4/1/2010	2:18:03 PM	H2 valve closed
4/1/2010	2:18:03 PM	BCl3 valve closed
4/1/2010	2:18:03 PM	PH3 valve closed
4/1/2010	2:18:03 PM	SiCl4 pre valve closed
4/1/2010	2:18:03 PM	SiCl4 post valve closed
4/1/2010	2:18:03 PM	Main Vac valve closed
4/1/2010	2:18:03 PM	Bypass valve closed
4/1/2010	2:18:03 PM	Bubbler valve closed
4/1/2010	2:18:03 PM	Helium MFC set to  0.000000
4/1/2010	2:18:03 PM	H2 MFC set to  0.000000
4/1/2010	2:18:03 PM	BCl3 MFC set to  0.000000
4/1/2010	2:18:03 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:18:03 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:18:03 PM	Tube furnace set to 0
4/1/2010	2:18:18 PM	Helium valve closed
4/1/2010	2:18:18 PM	H2 valve closed
4/1/2010	2:18:18 PM	BCl3 valve closed
4/1/2010	2:18:18 PM	PH3 valve closed
4/1/2010	2:18:18 PM	SiCl4 pre valve closed
4/1/2010	2:18:18 PM	SiCl4 post valve closed
4/1/2010	2:18:18 PM	Main Vac valve closed
4/1/2010	2:18:18 PM	Bubbler valve closed
4/1/2010	2:18:18 PM	Bypass valve opened
4/1/2010	2:18:18 PM	Helium MFC set to  0.000000
4/1/2010	2:18:18 PM	H2 MFC set to  0.000000
4/1/2010	2:18:18 PM	BCl3 MFC set to  0.000000
4/1/2010	2:18:18 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:18:18 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:18:19 PM	Tube furnace set to 0
4/1/2010	2:18:40 PM	Helium valve closed
4/1/2010	2:18:40 PM	H2 valve closed
4/1/2010	2:18:40 PM	BCl3 valve closed
4/1/2010	2:18:40 PM	PH3 valve closed
4/1/2010	2:18:40 PM	SiCl4 pre valve closed
4/1/2010	2:18:40 PM	SiCl4 post valve closed
4/1/2010	2:18:40 PM	Bubbler valve closed
4/1/2010	2:18:40 PM	Main Vac valve opened
4/1/2010	2:18:40 PM	Bypass valve opened
4/1/2010	2:18:40 PM	Helium MFC set to  0.000000
4/1/2010	2:18:40 PM	H2 MFC set to  0.000000
4/1/2010	2:18:40 PM	BCl3 MFC set to  0.000000
4/1/2010	2:18:40 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:18:40 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:18:40 PM	Tube furnace set to 0
4/1/2010	2:23:40 PM	Helium valve closed
4/1/2010	2:23:40 PM	H2 valve closed
4/1/2010	2:23:40 PM	BCl3 valve closed
4/1/2010	2:23:40 PM	PH3 valve closed
4/1/2010	2:23:40 PM	SiCl4 pre valve closed
4/1/2010	2:23:40 PM	SiCl4 post valve closed
4/1/2010	2:23:40 PM	Bubbler valve closed
4/1/2010	2:23:40 PM	Main Vac valve opened
4/1/2010	2:23:40 PM	Bypass valve opened
4/1/2010	2:23:40 PM	Helium MFC set to  0.000000
4/1/2010	2:23:40 PM	H2 MFC set to  0.000000
4/1/2010	2:23:40 PM	BCl3 MFC set to  0.000000
4/1/2010	2:23:40 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:23:40 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:23:40 PM	Tube furnace set to 0
4/1/2010	2:23:41 PM	Run finished at 2:23 PM
4/1/2010	2:23:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	2:28:08 PM	Main Vac valve closed
4/1/2010	2:28:09 PM	Bypass valve closed
4/1/2010	2:28:20 PM	Bypass valve opened
4/1/2010	2:28:21 PM	Main Vac valve opened
4/1/2010	2:28:54 PM	Recipe started at 2:28 PM
4/1/2010	2:28:54 PM	Helium valve closed
4/1/2010	2:28:54 PM	BCl3 valve closed
4/1/2010	2:28:54 PM	PH3 valve closed
4/1/2010	2:28:54 PM	SiCl4 pre valve closed
4/1/2010	2:28:54 PM	SiCl4 post valve closed
4/1/2010	2:28:54 PM	Main Vac valve closed
4/1/2010	2:28:54 PM	Bypass valve closed
4/1/2010	2:28:54 PM	Bubbler valve closed
4/1/2010	2:28:54 PM	H2 valve opened
4/1/2010	2:28:54 PM	Helium MFC set to  0.000000
4/1/2010	2:28:54 PM	H2 MFC set to  500.000000
4/1/2010	2:28:54 PM	BCl3 MFC set to  0.000000
4/1/2010	2:28:54 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:28:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:28:55 PM	Tube furnace set to 1000
4/1/2010	2:30:13 PM	Helium valve closed
4/1/2010	2:30:13 PM	BCl3 valve closed
4/1/2010	2:30:13 PM	PH3 valve closed
4/1/2010	2:30:13 PM	SiCl4 pre valve closed
4/1/2010	2:30:13 PM	SiCl4 post valve closed
4/1/2010	2:30:13 PM	Main Vac valve closed
4/1/2010	2:30:13 PM	Bypass valve closed
4/1/2010	2:30:13 PM	H2 valve opened
4/1/2010	2:30:13 PM	Bubbler valve opened
4/1/2010	2:30:13 PM	Helium MFC set to  0.000000
4/1/2010	2:30:13 PM	H2 MFC set to  500.000000
4/1/2010	2:30:13 PM	BCl3 MFC set to  0.000000
4/1/2010	2:30:13 PM	SiCl4 MFC set to  0.000000
4/1/2010	2:30:13 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:30:13 PM	Tube furnace set to 1000
4/1/2010	2:50:13 PM	Helium valve closed
4/1/2010	2:50:13 PM	BCl3 valve closed
4/1/2010	2:50:13 PM	PH3 valve closed
4/1/2010	2:50:13 PM	Main Vac valve closed
4/1/2010	2:50:13 PM	Bypass valve closed
4/1/2010	2:50:13 PM	H2 valve opened
4/1/2010	2:50:13 PM	SiCl4 pre valve opened
4/1/2010	2:50:13 PM	SiCl4 post valve opened
4/1/2010	2:50:13 PM	Bubbler valve opened
4/1/2010	2:50:13 PM	Helium MFC set to  0.000000
4/1/2010	2:50:13 PM	H2 MFC set to  500.000000
4/1/2010	2:50:13 PM	BCl3 MFC set to  0.000000
4/1/2010	2:50:13 PM	SiCl4 MFC set to  325.000000
4/1/2010	2:50:13 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	2:50:13 PM	Tube furnace set to 1000
4/1/2010	3:10:13 PM	Helium valve closed
4/1/2010	3:10:13 PM	BCl3 valve closed
4/1/2010	3:10:13 PM	PH3 valve closed
4/1/2010	3:10:13 PM	SiCl4 pre valve closed
4/1/2010	3:10:13 PM	SiCl4 post valve closed
4/1/2010	3:10:13 PM	Main Vac valve closed
4/1/2010	3:10:13 PM	Bypass valve closed
4/1/2010	3:10:13 PM	H2 valve opened
4/1/2010	3:10:13 PM	Bubbler valve opened
4/1/2010	3:10:13 PM	Helium MFC set to  0.000000
4/1/2010	3:10:13 PM	H2 MFC set to  500.000000
4/1/2010	3:10:13 PM	BCl3 MFC set to  0.000000
4/1/2010	3:10:13 PM	SiCl4 MFC set to  0.000000
4/1/2010	3:10:13 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	3:10:13 PM	Tube furnace set to 750
4/1/2010	3:30:13 PM	H2 valve closed
4/1/2010	3:30:13 PM	BCl3 valve closed
4/1/2010	3:30:13 PM	PH3 valve closed
4/1/2010	3:30:13 PM	SiCl4 pre valve closed
4/1/2010	3:30:13 PM	SiCl4 post valve closed
4/1/2010	3:30:13 PM	Main Vac valve closed
4/1/2010	3:30:13 PM	Bypass valve closed
4/1/2010	3:30:13 PM	Helium valve opened
4/1/2010	3:30:13 PM	Bubbler valve opened
4/1/2010	3:30:13 PM	Helium MFC set to  500.000000
4/1/2010	3:30:13 PM	H2 MFC set to  0.000000
4/1/2010	3:30:13 PM	BCl3 MFC set to  0.000000
4/1/2010	3:30:13 PM	SiCl4 MFC set to  0.000000
4/1/2010	3:30:13 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	3:30:13 PM	Tube furnace set to 0
4/1/2010	3:49:19 PM	Run aborted at 3:49 PM
4/1/2010	3:49:19 PM	Helium valve closed
4/1/2010	3:49:19 PM	H2 valve closed
4/1/2010	3:49:19 PM	BCl3 valve closed
4/1/2010	3:49:19 PM	PH3 valve closed
4/1/2010	3:49:19 PM	SiCl4 pre valve closed
4/1/2010	3:49:19 PM	SiCl4 post valve closed
4/1/2010	3:49:19 PM	Bypass valve closed
4/1/2010	3:49:19 PM	Main Vac valve closed
4/1/2010	3:49:19 PM	Bubbler valve closed
4/1/2010	3:49:19 PM	Helium MFC set to  0.000000
4/1/2010	3:49:19 PM	H2 MFC set to  0.000000
4/1/2010	3:49:19 PM	BCl3 MFC set to  0.000000
4/1/2010	3:49:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	3:49:19 PM	Tube furnace set to 0
4/1/2010	4:11:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	4:11:31 PM	Recipe started at 4:11 PM
4/1/2010	4:11:31 PM	Helium valve closed
4/1/2010	4:11:31 PM	H2 valve closed
4/1/2010	4:11:31 PM	BCl3 valve closed
4/1/2010	4:11:31 PM	PH3 valve closed
4/1/2010	4:11:31 PM	SiCl4 pre valve closed
4/1/2010	4:11:31 PM	SiCl4 post valve closed
4/1/2010	4:11:31 PM	Main Vac valve closed
4/1/2010	4:11:31 PM	Bubbler valve closed
4/1/2010	4:11:31 PM	Bypass valve opened
4/1/2010	4:11:31 PM	Helium MFC set to  0.000000
4/1/2010	4:11:31 PM	H2 MFC set to  0.000000
4/1/2010	4:11:31 PM	BCl3 MFC set to  0.000000
4/1/2010	4:11:31 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:11:31 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:11:31 PM	Tube furnace set to 0
4/1/2010	4:12:03 PM	Helium valve closed
4/1/2010	4:12:03 PM	H2 valve closed
4/1/2010	4:12:03 PM	BCl3 valve closed
4/1/2010	4:12:03 PM	PH3 valve closed
4/1/2010	4:12:03 PM	SiCl4 pre valve closed
4/1/2010	4:12:03 PM	SiCl4 post valve closed
4/1/2010	4:12:03 PM	Bubbler valve closed
4/1/2010	4:12:03 PM	Main Vac valve opened
4/1/2010	4:12:03 PM	Bypass valve opened
4/1/2010	4:12:03 PM	Helium MFC set to  0.000000
4/1/2010	4:12:03 PM	H2 MFC set to  0.000000
4/1/2010	4:12:03 PM	BCl3 MFC set to  0.000000
4/1/2010	4:12:03 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:12:03 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:12:03 PM	Tube furnace set to 0
4/1/2010	4:12:03 PM	Run finished at 4:12 PM
4/1/2010	4:12:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	4:19:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	4:20:05 PM	Recipe started at 4:20 PM
4/1/2010	4:20:05 PM	H2 valve closed
4/1/2010	4:20:05 PM	BCl3 valve closed
4/1/2010	4:20:05 PM	PH3 valve closed
4/1/2010	4:20:05 PM	SiCl4 pre valve closed
4/1/2010	4:20:05 PM	SiCl4 post valve closed
4/1/2010	4:20:05 PM	Main Vac valve closed
4/1/2010	4:20:05 PM	Bypass valve closed
4/1/2010	4:20:05 PM	Bubbler valve closed
4/1/2010	4:20:05 PM	Helium valve opened
4/1/2010	4:20:05 PM	Helium MFC set to  500.000000
4/1/2010	4:20:05 PM	H2 MFC set to  0.000000
4/1/2010	4:20:05 PM	BCl3 MFC set to  0.000000
4/1/2010	4:20:05 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:20:05 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:20:05 PM	Tube furnace set to 0
4/1/2010	4:21:25 PM	Helium valve closed
4/1/2010	4:21:25 PM	H2 valve closed
4/1/2010	4:21:25 PM	BCl3 valve closed
4/1/2010	4:21:25 PM	PH3 valve closed
4/1/2010	4:21:25 PM	SiCl4 pre valve closed
4/1/2010	4:21:25 PM	SiCl4 post valve closed
4/1/2010	4:21:25 PM	Main Vac valve closed
4/1/2010	4:21:25 PM	Bypass valve closed
4/1/2010	4:21:25 PM	Bubbler valve closed
4/1/2010	4:21:25 PM	Helium MFC set to  0.000000
4/1/2010	4:21:25 PM	H2 MFC set to  0.000000
4/1/2010	4:21:25 PM	BCl3 MFC set to  0.000000
4/1/2010	4:21:25 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:21:25 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:21:25 PM	Tube furnace set to 0
4/1/2010	4:21:40 PM	Helium valve closed
4/1/2010	4:21:40 PM	H2 valve closed
4/1/2010	4:21:40 PM	BCl3 valve closed
4/1/2010	4:21:40 PM	PH3 valve closed
4/1/2010	4:21:40 PM	SiCl4 pre valve closed
4/1/2010	4:21:40 PM	SiCl4 post valve closed
4/1/2010	4:21:40 PM	Main Vac valve closed
4/1/2010	4:21:40 PM	Bubbler valve closed
4/1/2010	4:21:40 PM	Bypass valve opened
4/1/2010	4:21:40 PM	Helium MFC set to  0.000000
4/1/2010	4:21:40 PM	H2 MFC set to  0.000000
4/1/2010	4:21:40 PM	BCl3 MFC set to  0.000000
4/1/2010	4:21:40 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:21:40 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:21:40 PM	Tube furnace set to 0
4/1/2010	4:22:02 PM	Helium valve closed
4/1/2010	4:22:02 PM	H2 valve closed
4/1/2010	4:22:02 PM	BCl3 valve closed
4/1/2010	4:22:02 PM	PH3 valve closed
4/1/2010	4:22:02 PM	SiCl4 pre valve closed
4/1/2010	4:22:02 PM	SiCl4 post valve closed
4/1/2010	4:22:02 PM	Bubbler valve closed
4/1/2010	4:22:02 PM	Main Vac valve opened
4/1/2010	4:22:02 PM	Bypass valve opened
4/1/2010	4:22:02 PM	Helium MFC set to  0.000000
4/1/2010	4:22:02 PM	H2 MFC set to  0.000000
4/1/2010	4:22:02 PM	BCl3 MFC set to  0.000000
4/1/2010	4:22:02 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:22:02 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:22:02 PM	Tube furnace set to 0
4/1/2010	4:27:02 PM	H2 valve closed
4/1/2010	4:27:02 PM	BCl3 valve closed
4/1/2010	4:27:02 PM	PH3 valve closed
4/1/2010	4:27:02 PM	SiCl4 pre valve closed
4/1/2010	4:27:02 PM	SiCl4 post valve closed
4/1/2010	4:27:02 PM	Main Vac valve closed
4/1/2010	4:27:02 PM	Bypass valve closed
4/1/2010	4:27:02 PM	Bubbler valve closed
4/1/2010	4:27:02 PM	Helium valve opened
4/1/2010	4:27:02 PM	Helium MFC set to  500.000000
4/1/2010	4:27:02 PM	H2 MFC set to  0.000000
4/1/2010	4:27:02 PM	BCl3 MFC set to  0.000000
4/1/2010	4:27:02 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:27:02 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:27:02 PM	Tube furnace set to 0
4/1/2010	4:28:21 PM	Helium valve closed
4/1/2010	4:28:21 PM	H2 valve closed
4/1/2010	4:28:21 PM	BCl3 valve closed
4/1/2010	4:28:21 PM	PH3 valve closed
4/1/2010	4:28:21 PM	SiCl4 pre valve closed
4/1/2010	4:28:21 PM	SiCl4 post valve closed
4/1/2010	4:28:21 PM	Main Vac valve closed
4/1/2010	4:28:21 PM	Bypass valve closed
4/1/2010	4:28:21 PM	Bubbler valve closed
4/1/2010	4:28:21 PM	Helium MFC set to  0.000000
4/1/2010	4:28:21 PM	H2 MFC set to  0.000000
4/1/2010	4:28:21 PM	BCl3 MFC set to  0.000000
4/1/2010	4:28:21 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:28:21 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:28:22 PM	Tube furnace set to 0
4/1/2010	4:28:37 PM	Helium valve closed
4/1/2010	4:28:37 PM	H2 valve closed
4/1/2010	4:28:37 PM	BCl3 valve closed
4/1/2010	4:28:37 PM	PH3 valve closed
4/1/2010	4:28:37 PM	SiCl4 pre valve closed
4/1/2010	4:28:37 PM	SiCl4 post valve closed
4/1/2010	4:28:37 PM	Main Vac valve closed
4/1/2010	4:28:37 PM	Bubbler valve closed
4/1/2010	4:28:37 PM	Bypass valve opened
4/1/2010	4:28:37 PM	Helium MFC set to  0.000000
4/1/2010	4:28:37 PM	H2 MFC set to  0.000000
4/1/2010	4:28:37 PM	BCl3 MFC set to  0.000000
4/1/2010	4:28:37 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:28:37 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:28:37 PM	Tube furnace set to 0
4/1/2010	4:28:58 PM	Helium valve closed
4/1/2010	4:28:58 PM	H2 valve closed
4/1/2010	4:28:58 PM	BCl3 valve closed
4/1/2010	4:28:58 PM	PH3 valve closed
4/1/2010	4:28:58 PM	SiCl4 pre valve closed
4/1/2010	4:28:58 PM	SiCl4 post valve closed
4/1/2010	4:28:58 PM	Bubbler valve closed
4/1/2010	4:28:58 PM	Main Vac valve opened
4/1/2010	4:28:58 PM	Bypass valve opened
4/1/2010	4:28:58 PM	Helium MFC set to  0.000000
4/1/2010	4:28:58 PM	H2 MFC set to  0.000000
4/1/2010	4:28:58 PM	BCl3 MFC set to  0.000000
4/1/2010	4:28:58 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:28:58 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:28:58 PM	Tube furnace set to 0
4/1/2010	4:33:58 PM	H2 valve closed
4/1/2010	4:33:58 PM	BCl3 valve closed
4/1/2010	4:33:58 PM	PH3 valve closed
4/1/2010	4:33:58 PM	SiCl4 pre valve closed
4/1/2010	4:33:58 PM	SiCl4 post valve closed
4/1/2010	4:33:58 PM	Main Vac valve closed
4/1/2010	4:33:58 PM	Bypass valve closed
4/1/2010	4:33:58 PM	Bubbler valve closed
4/1/2010	4:33:58 PM	Helium valve opened
4/1/2010	4:33:58 PM	Helium MFC set to  500.000000
4/1/2010	4:33:58 PM	H2 MFC set to  0.000000
4/1/2010	4:33:58 PM	BCl3 MFC set to  0.000000
4/1/2010	4:33:58 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:33:58 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:33:59 PM	Tube furnace set to 0
4/1/2010	4:35:18 PM	Helium valve closed
4/1/2010	4:35:18 PM	H2 valve closed
4/1/2010	4:35:18 PM	BCl3 valve closed
4/1/2010	4:35:18 PM	PH3 valve closed
4/1/2010	4:35:18 PM	SiCl4 pre valve closed
4/1/2010	4:35:18 PM	SiCl4 post valve closed
4/1/2010	4:35:18 PM	Main Vac valve closed
4/1/2010	4:35:18 PM	Bypass valve closed
4/1/2010	4:35:18 PM	Bubbler valve closed
4/1/2010	4:35:18 PM	Helium MFC set to  0.000000
4/1/2010	4:35:18 PM	H2 MFC set to  0.000000
4/1/2010	4:35:18 PM	BCl3 MFC set to  0.000000
4/1/2010	4:35:18 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:35:18 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:35:18 PM	Tube furnace set to 0
4/1/2010	4:35:33 PM	Helium valve closed
4/1/2010	4:35:33 PM	H2 valve closed
4/1/2010	4:35:33 PM	BCl3 valve closed
4/1/2010	4:35:33 PM	PH3 valve closed
4/1/2010	4:35:33 PM	SiCl4 pre valve closed
4/1/2010	4:35:33 PM	SiCl4 post valve closed
4/1/2010	4:35:33 PM	Main Vac valve closed
4/1/2010	4:35:33 PM	Bubbler valve closed
4/1/2010	4:35:33 PM	Bypass valve opened
4/1/2010	4:35:33 PM	Helium MFC set to  0.000000
4/1/2010	4:35:33 PM	H2 MFC set to  0.000000
4/1/2010	4:35:33 PM	BCl3 MFC set to  0.000000
4/1/2010	4:35:33 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:35:33 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:35:34 PM	Tube furnace set to 0
4/1/2010	4:35:55 PM	Helium valve closed
4/1/2010	4:35:55 PM	H2 valve closed
4/1/2010	4:35:55 PM	BCl3 valve closed
4/1/2010	4:35:55 PM	PH3 valve closed
4/1/2010	4:35:55 PM	SiCl4 pre valve closed
4/1/2010	4:35:55 PM	SiCl4 post valve closed
4/1/2010	4:35:55 PM	Bubbler valve closed
4/1/2010	4:35:55 PM	Main Vac valve opened
4/1/2010	4:35:55 PM	Bypass valve opened
4/1/2010	4:35:55 PM	Helium MFC set to  0.000000
4/1/2010	4:35:55 PM	H2 MFC set to  0.000000
4/1/2010	4:35:55 PM	BCl3 MFC set to  0.000000
4/1/2010	4:35:55 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:35:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:35:55 PM	Tube furnace set to 0
4/1/2010	4:40:55 PM	Helium valve closed
4/1/2010	4:40:55 PM	H2 valve closed
4/1/2010	4:40:55 PM	BCl3 valve closed
4/1/2010	4:40:55 PM	PH3 valve closed
4/1/2010	4:40:55 PM	SiCl4 pre valve closed
4/1/2010	4:40:55 PM	SiCl4 post valve closed
4/1/2010	4:40:55 PM	Bubbler valve closed
4/1/2010	4:40:55 PM	Main Vac valve opened
4/1/2010	4:40:55 PM	Bypass valve opened
4/1/2010	4:40:55 PM	Helium MFC set to  0.000000
4/1/2010	4:40:55 PM	H2 MFC set to  0.000000
4/1/2010	4:40:55 PM	BCl3 MFC set to  0.000000
4/1/2010	4:40:55 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:40:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:40:55 PM	Tube furnace set to 0
4/1/2010	4:40:56 PM	Run finished at 4:40 PM
4/1/2010	4:40:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	4:45:04 PM	Main Vac valve closed
4/1/2010	4:45:05 PM	Bypass valve closed
4/1/2010	4:45:14 PM	Main Vac valve opened
4/1/2010	4:45:14 PM	Bypass valve opened
4/1/2010	4:45:38 PM	Recipe started at 4:45 PM
4/1/2010	4:45:38 PM	Helium valve closed
4/1/2010	4:45:38 PM	BCl3 valve closed
4/1/2010	4:45:38 PM	PH3 valve closed
4/1/2010	4:45:38 PM	SiCl4 pre valve closed
4/1/2010	4:45:38 PM	SiCl4 post valve closed
4/1/2010	4:45:38 PM	Main Vac valve closed
4/1/2010	4:45:38 PM	Bypass valve closed
4/1/2010	4:45:38 PM	Bubbler valve closed
4/1/2010	4:45:38 PM	H2 valve opened
4/1/2010	4:45:38 PM	Helium MFC set to  0.000000
4/1/2010	4:45:38 PM	H2 MFC set to  500.000000
4/1/2010	4:45:38 PM	BCl3 MFC set to  0.000000
4/1/2010	4:45:38 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:45:38 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:45:38 PM	Tube furnace set to 1000
4/1/2010	4:46:56 PM	Helium valve closed
4/1/2010	4:46:56 PM	BCl3 valve closed
4/1/2010	4:46:56 PM	PH3 valve closed
4/1/2010	4:46:56 PM	SiCl4 pre valve closed
4/1/2010	4:46:56 PM	SiCl4 post valve closed
4/1/2010	4:46:56 PM	Main Vac valve closed
4/1/2010	4:46:56 PM	Bypass valve closed
4/1/2010	4:46:56 PM	H2 valve opened
4/1/2010	4:46:56 PM	Bubbler valve opened
4/1/2010	4:46:56 PM	Helium MFC set to  0.000000
4/1/2010	4:46:56 PM	H2 MFC set to  500.000000
4/1/2010	4:46:56 PM	BCl3 MFC set to  0.000000
4/1/2010	4:46:56 PM	SiCl4 MFC set to  0.000000
4/1/2010	4:46:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	4:46:57 PM	Tube furnace set to 1000
4/1/2010	5:06:57 PM	Helium valve closed
4/1/2010	5:06:57 PM	BCl3 valve closed
4/1/2010	5:06:57 PM	PH3 valve closed
4/1/2010	5:06:57 PM	Main Vac valve closed
4/1/2010	5:06:57 PM	Bypass valve closed
4/1/2010	5:06:57 PM	H2 valve opened
4/1/2010	5:06:57 PM	SiCl4 pre valve opened
4/1/2010	5:06:57 PM	SiCl4 post valve opened
4/1/2010	5:06:57 PM	Bubbler valve opened
4/1/2010	5:06:57 PM	Helium MFC set to  0.000000
4/1/2010	5:06:57 PM	H2 MFC set to  500.000000
4/1/2010	5:06:57 PM	BCl3 MFC set to  0.000000
4/1/2010	5:06:57 PM	SiCl4 MFC set to  325.000000
4/1/2010	5:06:57 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	5:06:57 PM	Tube furnace set to 1000
4/1/2010	5:26:57 PM	Helium valve closed
4/1/2010	5:26:57 PM	BCl3 valve closed
4/1/2010	5:26:57 PM	PH3 valve closed
4/1/2010	5:26:57 PM	SiCl4 pre valve closed
4/1/2010	5:26:57 PM	SiCl4 post valve closed
4/1/2010	5:26:57 PM	Main Vac valve closed
4/1/2010	5:26:57 PM	Bypass valve closed
4/1/2010	5:26:57 PM	H2 valve opened
4/1/2010	5:26:57 PM	Bubbler valve opened
4/1/2010	5:26:57 PM	Helium MFC set to  0.000000
4/1/2010	5:26:57 PM	H2 MFC set to  500.000000
4/1/2010	5:26:57 PM	BCl3 MFC set to  0.000000
4/1/2010	5:26:57 PM	SiCl4 MFC set to  0.000000
4/1/2010	5:26:57 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	5:26:57 PM	Tube furnace set to 750
4/1/2010	5:46:57 PM	H2 valve closed
4/1/2010	5:46:57 PM	BCl3 valve closed
4/1/2010	5:46:57 PM	PH3 valve closed
4/1/2010	5:46:57 PM	SiCl4 pre valve closed
4/1/2010	5:46:57 PM	SiCl4 post valve closed
4/1/2010	5:46:57 PM	Main Vac valve closed
4/1/2010	5:46:57 PM	Bypass valve closed
4/1/2010	5:46:57 PM	Helium valve opened
4/1/2010	5:46:57 PM	Bubbler valve opened
4/1/2010	5:46:57 PM	Helium MFC set to  500.000000
4/1/2010	5:46:57 PM	H2 MFC set to  0.000000
4/1/2010	5:46:57 PM	BCl3 MFC set to  0.000000
4/1/2010	5:46:57 PM	SiCl4 MFC set to  0.000000
4/1/2010	5:46:57 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	5:46:57 PM	Tube furnace set to 0
4/1/2010	6:06:22 PM	Run aborted at 6:06 PM
4/1/2010	6:06:22 PM	Helium valve closed
4/1/2010	6:06:22 PM	H2 valve closed
4/1/2010	6:06:22 PM	BCl3 valve closed
4/1/2010	6:06:22 PM	PH3 valve closed
4/1/2010	6:06:22 PM	SiCl4 pre valve closed
4/1/2010	6:06:22 PM	SiCl4 post valve closed
4/1/2010	6:06:22 PM	Bypass valve closed
4/1/2010	6:06:22 PM	Main Vac valve closed
4/1/2010	6:06:22 PM	Bubbler valve closed
4/1/2010	6:06:22 PM	Helium MFC set to  0.000000
4/1/2010	6:06:22 PM	H2 MFC set to  0.000000
4/1/2010	6:06:22 PM	BCl3 MFC set to  0.000000
4/1/2010	6:06:22 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:06:22 PM	Tube furnace set to 0
4/1/2010	6:14:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	6:14:33 PM	Recipe started at 6:14 PM
4/1/2010	6:14:33 PM	Helium valve closed
4/1/2010	6:14:33 PM	H2 valve closed
4/1/2010	6:14:33 PM	BCl3 valve closed
4/1/2010	6:14:33 PM	PH3 valve closed
4/1/2010	6:14:33 PM	SiCl4 pre valve closed
4/1/2010	6:14:33 PM	SiCl4 post valve closed
4/1/2010	6:14:33 PM	Main Vac valve closed
4/1/2010	6:14:33 PM	Bubbler valve closed
4/1/2010	6:14:33 PM	Bypass valve opened
4/1/2010	6:14:33 PM	Helium MFC set to  0.000000
4/1/2010	6:14:33 PM	H2 MFC set to  0.000000
4/1/2010	6:14:33 PM	BCl3 MFC set to  0.000000
4/1/2010	6:14:33 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:14:33 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:14:33 PM	Tube furnace set to 0
4/1/2010	6:15:05 PM	Helium valve closed
4/1/2010	6:15:05 PM	H2 valve closed
4/1/2010	6:15:05 PM	BCl3 valve closed
4/1/2010	6:15:05 PM	PH3 valve closed
4/1/2010	6:15:05 PM	SiCl4 pre valve closed
4/1/2010	6:15:05 PM	SiCl4 post valve closed
4/1/2010	6:15:05 PM	Bubbler valve closed
4/1/2010	6:15:05 PM	Main Vac valve opened
4/1/2010	6:15:05 PM	Bypass valve opened
4/1/2010	6:15:05 PM	Helium MFC set to  0.000000
4/1/2010	6:15:05 PM	H2 MFC set to  0.000000
4/1/2010	6:15:05 PM	BCl3 MFC set to  0.000000
4/1/2010	6:15:05 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:15:05 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:15:05 PM	Tube furnace set to 0
4/1/2010	6:15:05 PM	Run finished at 6:15 PM
4/1/2010	6:15:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	6:17:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	6:18:02 PM	Recipe started at 6:17 PM
4/1/2010	6:18:02 PM	H2 valve closed
4/1/2010	6:18:02 PM	BCl3 valve closed
4/1/2010	6:18:02 PM	PH3 valve closed
4/1/2010	6:18:02 PM	SiCl4 pre valve closed
4/1/2010	6:18:02 PM	SiCl4 post valve closed
4/1/2010	6:18:02 PM	Main Vac valve closed
4/1/2010	6:18:02 PM	Bypass valve closed
4/1/2010	6:18:02 PM	Bubbler valve closed
4/1/2010	6:18:02 PM	Helium valve opened
4/1/2010	6:18:02 PM	Helium MFC set to  500.000000
4/1/2010	6:18:02 PM	H2 MFC set to  0.000000
4/1/2010	6:18:02 PM	BCl3 MFC set to  0.000000
4/1/2010	6:18:02 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:18:02 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:18:02 PM	Tube furnace set to 0
4/1/2010	6:19:22 PM	Helium valve closed
4/1/2010	6:19:22 PM	H2 valve closed
4/1/2010	6:19:22 PM	BCl3 valve closed
4/1/2010	6:19:22 PM	PH3 valve closed
4/1/2010	6:19:23 PM	SiCl4 pre valve closed
4/1/2010	6:19:23 PM	SiCl4 post valve closed
4/1/2010	6:19:23 PM	Main Vac valve closed
4/1/2010	6:19:23 PM	Bypass valve closed
4/1/2010	6:19:23 PM	Bubbler valve closed
4/1/2010	6:19:23 PM	Helium MFC set to  0.000000
4/1/2010	6:19:23 PM	H2 MFC set to  0.000000
4/1/2010	6:19:23 PM	BCl3 MFC set to  0.000000
4/1/2010	6:19:23 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:19:23 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:19:23 PM	Tube furnace set to 0
4/1/2010	6:19:38 PM	Helium valve closed
4/1/2010	6:19:38 PM	H2 valve closed
4/1/2010	6:19:38 PM	BCl3 valve closed
4/1/2010	6:19:38 PM	PH3 valve closed
4/1/2010	6:19:38 PM	SiCl4 pre valve closed
4/1/2010	6:19:38 PM	SiCl4 post valve closed
4/1/2010	6:19:38 PM	Main Vac valve closed
4/1/2010	6:19:38 PM	Bubbler valve closed
4/1/2010	6:19:38 PM	Bypass valve opened
4/1/2010	6:19:38 PM	Helium MFC set to  0.000000
4/1/2010	6:19:38 PM	H2 MFC set to  0.000000
4/1/2010	6:19:38 PM	BCl3 MFC set to  0.000000
4/1/2010	6:19:38 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:19:38 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:19:38 PM	Tube furnace set to 0
4/1/2010	6:20:00 PM	Helium valve closed
4/1/2010	6:20:00 PM	H2 valve closed
4/1/2010	6:20:00 PM	BCl3 valve closed
4/1/2010	6:20:00 PM	PH3 valve closed
4/1/2010	6:20:00 PM	SiCl4 pre valve closed
4/1/2010	6:20:00 PM	SiCl4 post valve closed
4/1/2010	6:20:00 PM	Bubbler valve closed
4/1/2010	6:20:00 PM	Main Vac valve opened
4/1/2010	6:20:00 PM	Bypass valve opened
4/1/2010	6:20:00 PM	Helium MFC set to  0.000000
4/1/2010	6:20:00 PM	H2 MFC set to  0.000000
4/1/2010	6:20:00 PM	BCl3 MFC set to  0.000000
4/1/2010	6:20:00 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:20:00 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:20:00 PM	Tube furnace set to 0
4/1/2010	6:25:00 PM	H2 valve closed
4/1/2010	6:25:00 PM	BCl3 valve closed
4/1/2010	6:25:00 PM	PH3 valve closed
4/1/2010	6:25:00 PM	SiCl4 pre valve closed
4/1/2010	6:25:00 PM	SiCl4 post valve closed
4/1/2010	6:25:00 PM	Main Vac valve closed
4/1/2010	6:25:00 PM	Bypass valve closed
4/1/2010	6:25:00 PM	Bubbler valve closed
4/1/2010	6:25:00 PM	Helium valve opened
4/1/2010	6:25:00 PM	Helium MFC set to  500.000000
4/1/2010	6:25:00 PM	H2 MFC set to  0.000000
4/1/2010	6:25:00 PM	BCl3 MFC set to  0.000000
4/1/2010	6:25:00 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:25:00 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:25:00 PM	Tube furnace set to 0
4/1/2010	6:26:19 PM	Helium valve closed
4/1/2010	6:26:19 PM	H2 valve closed
4/1/2010	6:26:19 PM	BCl3 valve closed
4/1/2010	6:26:19 PM	PH3 valve closed
4/1/2010	6:26:19 PM	SiCl4 pre valve closed
4/1/2010	6:26:19 PM	SiCl4 post valve closed
4/1/2010	6:26:19 PM	Main Vac valve closed
4/1/2010	6:26:19 PM	Bypass valve closed
4/1/2010	6:26:19 PM	Bubbler valve closed
4/1/2010	6:26:19 PM	Helium MFC set to  0.000000
4/1/2010	6:26:19 PM	H2 MFC set to  0.000000
4/1/2010	6:26:19 PM	BCl3 MFC set to  0.000000
4/1/2010	6:26:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:26:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:26:19 PM	Tube furnace set to 0
4/1/2010	6:26:34 PM	Helium valve closed
4/1/2010	6:26:34 PM	H2 valve closed
4/1/2010	6:26:34 PM	BCl3 valve closed
4/1/2010	6:26:34 PM	PH3 valve closed
4/1/2010	6:26:34 PM	SiCl4 pre valve closed
4/1/2010	6:26:34 PM	SiCl4 post valve closed
4/1/2010	6:26:34 PM	Main Vac valve closed
4/1/2010	6:26:34 PM	Bubbler valve closed
4/1/2010	6:26:34 PM	Bypass valve opened
4/1/2010	6:26:34 PM	Helium MFC set to  0.000000
4/1/2010	6:26:34 PM	H2 MFC set to  0.000000
4/1/2010	6:26:34 PM	BCl3 MFC set to  0.000000
4/1/2010	6:26:34 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:26:34 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:26:35 PM	Tube furnace set to 0
4/1/2010	6:26:56 PM	Helium valve closed
4/1/2010	6:26:56 PM	H2 valve closed
4/1/2010	6:26:56 PM	BCl3 valve closed
4/1/2010	6:26:56 PM	PH3 valve closed
4/1/2010	6:26:56 PM	SiCl4 pre valve closed
4/1/2010	6:26:56 PM	SiCl4 post valve closed
4/1/2010	6:26:56 PM	Bubbler valve closed
4/1/2010	6:26:56 PM	Main Vac valve opened
4/1/2010	6:26:56 PM	Bypass valve opened
4/1/2010	6:26:56 PM	Helium MFC set to  0.000000
4/1/2010	6:26:56 PM	H2 MFC set to  0.000000
4/1/2010	6:26:56 PM	BCl3 MFC set to  0.000000
4/1/2010	6:26:56 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:26:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:26:56 PM	Tube furnace set to 0
4/1/2010	6:31:56 PM	H2 valve closed
4/1/2010	6:31:56 PM	BCl3 valve closed
4/1/2010	6:31:56 PM	PH3 valve closed
4/1/2010	6:31:56 PM	SiCl4 pre valve closed
4/1/2010	6:31:56 PM	SiCl4 post valve closed
4/1/2010	6:31:56 PM	Main Vac valve closed
4/1/2010	6:31:56 PM	Bypass valve closed
4/1/2010	6:31:56 PM	Bubbler valve closed
4/1/2010	6:31:56 PM	Helium valve opened
4/1/2010	6:31:56 PM	Helium MFC set to  500.000000
4/1/2010	6:31:56 PM	H2 MFC set to  0.000000
4/1/2010	6:31:56 PM	BCl3 MFC set to  0.000000
4/1/2010	6:31:56 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:31:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:31:56 PM	Tube furnace set to 0
4/1/2010	6:33:15 PM	Helium valve closed
4/1/2010	6:33:15 PM	H2 valve closed
4/1/2010	6:33:15 PM	BCl3 valve closed
4/1/2010	6:33:15 PM	PH3 valve closed
4/1/2010	6:33:15 PM	SiCl4 pre valve closed
4/1/2010	6:33:15 PM	SiCl4 post valve closed
4/1/2010	6:33:15 PM	Main Vac valve closed
4/1/2010	6:33:15 PM	Bypass valve closed
4/1/2010	6:33:15 PM	Bubbler valve closed
4/1/2010	6:33:15 PM	Helium MFC set to  0.000000
4/1/2010	6:33:15 PM	H2 MFC set to  0.000000
4/1/2010	6:33:15 PM	BCl3 MFC set to  0.000000
4/1/2010	6:33:15 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:33:15 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:33:15 PM	Tube furnace set to 0
4/1/2010	6:33:30 PM	Helium valve closed
4/1/2010	6:33:30 PM	H2 valve closed
4/1/2010	6:33:30 PM	BCl3 valve closed
4/1/2010	6:33:30 PM	PH3 valve closed
4/1/2010	6:33:30 PM	SiCl4 pre valve closed
4/1/2010	6:33:30 PM	SiCl4 post valve closed
4/1/2010	6:33:30 PM	Main Vac valve closed
4/1/2010	6:33:30 PM	Bubbler valve closed
4/1/2010	6:33:30 PM	Bypass valve opened
4/1/2010	6:33:30 PM	Helium MFC set to  0.000000
4/1/2010	6:33:30 PM	H2 MFC set to  0.000000
4/1/2010	6:33:30 PM	BCl3 MFC set to  0.000000
4/1/2010	6:33:30 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:33:30 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:33:31 PM	Tube furnace set to 0
4/1/2010	6:33:52 PM	Helium valve closed
4/1/2010	6:33:52 PM	H2 valve closed
4/1/2010	6:33:52 PM	BCl3 valve closed
4/1/2010	6:33:52 PM	PH3 valve closed
4/1/2010	6:33:52 PM	SiCl4 pre valve closed
4/1/2010	6:33:52 PM	SiCl4 post valve closed
4/1/2010	6:33:52 PM	Bubbler valve closed
4/1/2010	6:33:52 PM	Main Vac valve opened
4/1/2010	6:33:52 PM	Bypass valve opened
4/1/2010	6:33:52 PM	Helium MFC set to  0.000000
4/1/2010	6:33:52 PM	H2 MFC set to  0.000000
4/1/2010	6:33:52 PM	BCl3 MFC set to  0.000000
4/1/2010	6:33:52 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:33:52 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:33:52 PM	Tube furnace set to 0
4/1/2010	6:38:52 PM	Helium valve closed
4/1/2010	6:38:52 PM	H2 valve closed
4/1/2010	6:38:52 PM	BCl3 valve closed
4/1/2010	6:38:52 PM	PH3 valve closed
4/1/2010	6:38:52 PM	SiCl4 pre valve closed
4/1/2010	6:38:52 PM	SiCl4 post valve closed
4/1/2010	6:38:52 PM	Bubbler valve closed
4/1/2010	6:38:52 PM	Main Vac valve opened
4/1/2010	6:38:52 PM	Bypass valve opened
4/1/2010	6:38:52 PM	Helium MFC set to  0.000000
4/1/2010	6:38:52 PM	H2 MFC set to  0.000000
4/1/2010	6:38:52 PM	BCl3 MFC set to  0.000000
4/1/2010	6:38:52 PM	SiCl4 MFC set to  0.000000
4/1/2010	6:38:52 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	6:38:52 PM	Tube furnace set to 0
4/1/2010	6:38:53 PM	Run finished at 6:38 PM
4/1/2010	6:38:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	7:00:18 PM	Main Vac valve closed
4/1/2010	7:00:19 PM	Bypass valve closed
4/1/2010	7:00:24 PM	Bypass valve opened
4/1/2010	7:00:25 PM	Main Vac valve opened
4/1/2010	7:01:00 PM	Recipe started at 7:00 PM
4/1/2010	7:01:00 PM	Helium valve closed
4/1/2010	7:01:00 PM	BCl3 valve closed
4/1/2010	7:01:00 PM	PH3 valve closed
4/1/2010	7:01:00 PM	SiCl4 pre valve closed
4/1/2010	7:01:00 PM	SiCl4 post valve closed
4/1/2010	7:01:00 PM	Main Vac valve closed
4/1/2010	7:01:00 PM	Bypass valve closed
4/1/2010	7:01:00 PM	Bubbler valve closed
4/1/2010	7:01:00 PM	H2 valve opened
4/1/2010	7:01:00 PM	Helium MFC set to  0.000000
4/1/2010	7:01:00 PM	H2 MFC set to  500.000000
4/1/2010	7:01:00 PM	BCl3 MFC set to  0.000000
4/1/2010	7:01:00 PM	SiCl4 MFC set to  0.000000
4/1/2010	7:01:00 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:01:00 PM	Tube furnace set to 1000
4/1/2010	7:02:19 PM	Helium valve closed
4/1/2010	7:02:19 PM	BCl3 valve closed
4/1/2010	7:02:19 PM	PH3 valve closed
4/1/2010	7:02:19 PM	SiCl4 pre valve closed
4/1/2010	7:02:19 PM	SiCl4 post valve closed
4/1/2010	7:02:19 PM	Main Vac valve closed
4/1/2010	7:02:19 PM	Bypass valve closed
4/1/2010	7:02:19 PM	H2 valve opened
4/1/2010	7:02:19 PM	Bubbler valve opened
4/1/2010	7:02:19 PM	Helium MFC set to  0.000000
4/1/2010	7:02:19 PM	H2 MFC set to  500.000000
4/1/2010	7:02:19 PM	BCl3 MFC set to  0.000000
4/1/2010	7:02:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	7:02:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:02:19 PM	Tube furnace set to 1000
4/1/2010	7:22:19 PM	Helium valve closed
4/1/2010	7:22:19 PM	BCl3 valve closed
4/1/2010	7:22:19 PM	PH3 valve closed
4/1/2010	7:22:19 PM	Main Vac valve closed
4/1/2010	7:22:19 PM	Bypass valve closed
4/1/2010	7:22:19 PM	H2 valve opened
4/1/2010	7:22:19 PM	SiCl4 pre valve opened
4/1/2010	7:22:19 PM	SiCl4 post valve opened
4/1/2010	7:22:19 PM	Bubbler valve opened
4/1/2010	7:22:19 PM	Helium MFC set to  0.000000
4/1/2010	7:22:19 PM	H2 MFC set to  500.000000
4/1/2010	7:22:19 PM	BCl3 MFC set to  0.000000
4/1/2010	7:22:19 PM	SiCl4 MFC set to  325.000000
4/1/2010	7:22:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:22:19 PM	Tube furnace set to 1000
4/1/2010	7:42:19 PM	Helium valve closed
4/1/2010	7:42:19 PM	BCl3 valve closed
4/1/2010	7:42:19 PM	PH3 valve closed
4/1/2010	7:42:19 PM	SiCl4 pre valve closed
4/1/2010	7:42:19 PM	SiCl4 post valve closed
4/1/2010	7:42:19 PM	Main Vac valve closed
4/1/2010	7:42:19 PM	Bypass valve closed
4/1/2010	7:42:19 PM	H2 valve opened
4/1/2010	7:42:19 PM	Bubbler valve opened
4/1/2010	7:42:19 PM	Helium MFC set to  0.000000
4/1/2010	7:42:19 PM	H2 MFC set to  500.000000
4/1/2010	7:42:19 PM	BCl3 MFC set to  0.000000
4/1/2010	7:42:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	7:42:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	7:42:19 PM	Tube furnace set to 750
4/1/2010	8:02:19 PM	H2 valve closed
4/1/2010	8:02:19 PM	BCl3 valve closed
4/1/2010	8:02:19 PM	PH3 valve closed
4/1/2010	8:02:19 PM	SiCl4 pre valve closed
4/1/2010	8:02:19 PM	SiCl4 post valve closed
4/1/2010	8:02:19 PM	Main Vac valve closed
4/1/2010	8:02:19 PM	Bypass valve closed
4/1/2010	8:02:19 PM	Helium valve opened
4/1/2010	8:02:19 PM	Bubbler valve opened
4/1/2010	8:02:19 PM	Helium MFC set to  500.000000
4/1/2010	8:02:19 PM	H2 MFC set to  0.000000
4/1/2010	8:02:19 PM	BCl3 MFC set to  0.000000
4/1/2010	8:02:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	8:02:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:02:19 PM	Tube furnace set to 0
4/1/2010	8:22:19 PM	Helium valve closed
4/1/2010	8:22:19 PM	H2 valve closed
4/1/2010	8:22:19 PM	BCl3 valve closed
4/1/2010	8:22:19 PM	PH3 valve closed
4/1/2010	8:22:19 PM	SiCl4 pre valve closed
4/1/2010	8:22:19 PM	SiCl4 post valve closed
4/1/2010	8:22:19 PM	Main Vac valve closed
4/1/2010	8:22:19 PM	Bypass valve closed
4/1/2010	8:22:19 PM	Bubbler valve closed
4/1/2010	8:22:19 PM	Helium MFC set to  0.000000
4/1/2010	8:22:19 PM	H2 MFC set to  0.000000
4/1/2010	8:22:19 PM	BCl3 MFC set to  0.000000
4/1/2010	8:22:19 PM	SiCl4 MFC set to  0.000000
4/1/2010	8:22:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	8:22:19 PM	Tube furnace set to 0
4/1/2010	8:22:20 PM	Run finished at 8:22 PM
4/1/2010	9:08:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	9:08:31 PM	Recipe started at 9:08 PM
4/1/2010	9:08:31 PM	Helium valve closed
4/1/2010	9:08:31 PM	H2 valve closed
4/1/2010	9:08:31 PM	BCl3 valve closed
4/1/2010	9:08:31 PM	PH3 valve closed
4/1/2010	9:08:31 PM	SiCl4 pre valve closed
4/1/2010	9:08:31 PM	SiCl4 post valve closed
4/1/2010	9:08:31 PM	Main Vac valve closed
4/1/2010	9:08:31 PM	Bubbler valve closed
4/1/2010	9:08:31 PM	Bypass valve opened
4/1/2010	9:08:31 PM	Helium MFC set to  0.000000
4/1/2010	9:08:31 PM	H2 MFC set to  0.000000
4/1/2010	9:08:31 PM	BCl3 MFC set to  0.000000
4/1/2010	9:08:31 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:08:31 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:08:32 PM	Tube furnace set to 0
4/1/2010	9:09:03 PM	Helium valve closed
4/1/2010	9:09:03 PM	H2 valve closed
4/1/2010	9:09:03 PM	BCl3 valve closed
4/1/2010	9:09:03 PM	PH3 valve closed
4/1/2010	9:09:03 PM	SiCl4 pre valve closed
4/1/2010	9:09:03 PM	SiCl4 post valve closed
4/1/2010	9:09:03 PM	Bubbler valve closed
4/1/2010	9:09:03 PM	Main Vac valve opened
4/1/2010	9:09:03 PM	Bypass valve opened
4/1/2010	9:09:03 PM	Helium MFC set to  0.000000
4/1/2010	9:09:03 PM	H2 MFC set to  0.000000
4/1/2010	9:09:03 PM	BCl3 MFC set to  0.000000
4/1/2010	9:09:03 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:09:03 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:09:03 PM	Tube furnace set to 0
4/1/2010	9:09:03 PM	Run finished at 9:09 PM
4/1/2010	9:09:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	9:11:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	9:11:57 PM	Recipe started at 9:11 PM
4/1/2010	9:11:57 PM	H2 valve closed
4/1/2010	9:11:57 PM	BCl3 valve closed
4/1/2010	9:11:57 PM	PH3 valve closed
4/1/2010	9:11:57 PM	SiCl4 pre valve closed
4/1/2010	9:11:57 PM	SiCl4 post valve closed
4/1/2010	9:11:57 PM	Main Vac valve closed
4/1/2010	9:11:57 PM	Bypass valve closed
4/1/2010	9:11:57 PM	Bubbler valve closed
4/1/2010	9:11:57 PM	Helium valve opened
4/1/2010	9:11:57 PM	Helium MFC set to  500.000000
4/1/2010	9:11:57 PM	H2 MFC set to  0.000000
4/1/2010	9:11:57 PM	BCl3 MFC set to  0.000000
4/1/2010	9:11:57 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:11:57 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:11:58 PM	Tube furnace set to 0
4/1/2010	9:13:17 PM	Helium valve closed
4/1/2010	9:13:17 PM	H2 valve closed
4/1/2010	9:13:17 PM	BCl3 valve closed
4/1/2010	9:13:17 PM	PH3 valve closed
4/1/2010	9:13:17 PM	SiCl4 pre valve closed
4/1/2010	9:13:17 PM	SiCl4 post valve closed
4/1/2010	9:13:17 PM	Main Vac valve closed
4/1/2010	9:13:17 PM	Bypass valve closed
4/1/2010	9:13:17 PM	Bubbler valve closed
4/1/2010	9:13:17 PM	Helium MFC set to  0.000000
4/1/2010	9:13:17 PM	H2 MFC set to  0.000000
4/1/2010	9:13:17 PM	BCl3 MFC set to  0.000000
4/1/2010	9:13:17 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:13:17 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:13:17 PM	Tube furnace set to 0
4/1/2010	9:13:32 PM	Helium valve closed
4/1/2010	9:13:32 PM	H2 valve closed
4/1/2010	9:13:32 PM	BCl3 valve closed
4/1/2010	9:13:32 PM	PH3 valve closed
4/1/2010	9:13:32 PM	SiCl4 pre valve closed
4/1/2010	9:13:32 PM	SiCl4 post valve closed
4/1/2010	9:13:32 PM	Main Vac valve closed
4/1/2010	9:13:32 PM	Bubbler valve closed
4/1/2010	9:13:32 PM	Bypass valve opened
4/1/2010	9:13:32 PM	Helium MFC set to  0.000000
4/1/2010	9:13:32 PM	H2 MFC set to  0.000000
4/1/2010	9:13:32 PM	BCl3 MFC set to  0.000000
4/1/2010	9:13:32 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:13:32 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:13:32 PM	Tube furnace set to 0
4/1/2010	9:13:54 PM	Helium valve closed
4/1/2010	9:13:54 PM	H2 valve closed
4/1/2010	9:13:54 PM	BCl3 valve closed
4/1/2010	9:13:54 PM	PH3 valve closed
4/1/2010	9:13:54 PM	SiCl4 pre valve closed
4/1/2010	9:13:54 PM	SiCl4 post valve closed
4/1/2010	9:13:54 PM	Bubbler valve closed
4/1/2010	9:13:54 PM	Main Vac valve opened
4/1/2010	9:13:54 PM	Bypass valve opened
4/1/2010	9:13:54 PM	Helium MFC set to  0.000000
4/1/2010	9:13:54 PM	H2 MFC set to  0.000000
4/1/2010	9:13:54 PM	BCl3 MFC set to  0.000000
4/1/2010	9:13:54 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:13:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:13:54 PM	Tube furnace set to 0
4/1/2010	9:18:54 PM	H2 valve closed
4/1/2010	9:18:54 PM	BCl3 valve closed
4/1/2010	9:18:54 PM	PH3 valve closed
4/1/2010	9:18:54 PM	SiCl4 pre valve closed
4/1/2010	9:18:54 PM	SiCl4 post valve closed
4/1/2010	9:18:54 PM	Main Vac valve closed
4/1/2010	9:18:54 PM	Bypass valve closed
4/1/2010	9:18:54 PM	Bubbler valve closed
4/1/2010	9:18:54 PM	Helium valve opened
4/1/2010	9:18:54 PM	Helium MFC set to  500.000000
4/1/2010	9:18:54 PM	H2 MFC set to  0.000000
4/1/2010	9:18:54 PM	BCl3 MFC set to  0.000000
4/1/2010	9:18:54 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:18:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:18:54 PM	Tube furnace set to 0
4/1/2010	9:20:13 PM	Helium valve closed
4/1/2010	9:20:13 PM	H2 valve closed
4/1/2010	9:20:13 PM	BCl3 valve closed
4/1/2010	9:20:13 PM	PH3 valve closed
4/1/2010	9:20:13 PM	SiCl4 pre valve closed
4/1/2010	9:20:13 PM	SiCl4 post valve closed
4/1/2010	9:20:13 PM	Main Vac valve closed
4/1/2010	9:20:13 PM	Bypass valve closed
4/1/2010	9:20:13 PM	Bubbler valve closed
4/1/2010	9:20:13 PM	Helium MFC set to  0.000000
4/1/2010	9:20:13 PM	H2 MFC set to  0.000000
4/1/2010	9:20:13 PM	BCl3 MFC set to  0.000000
4/1/2010	9:20:13 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:20:13 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:20:13 PM	Tube furnace set to 0
4/1/2010	9:20:28 PM	Helium valve closed
4/1/2010	9:20:28 PM	H2 valve closed
4/1/2010	9:20:28 PM	BCl3 valve closed
4/1/2010	9:20:28 PM	PH3 valve closed
4/1/2010	9:20:28 PM	SiCl4 pre valve closed
4/1/2010	9:20:28 PM	SiCl4 post valve closed
4/1/2010	9:20:28 PM	Main Vac valve closed
4/1/2010	9:20:28 PM	Bubbler valve closed
4/1/2010	9:20:28 PM	Bypass valve opened
4/1/2010	9:20:28 PM	Helium MFC set to  0.000000
4/1/2010	9:20:28 PM	H2 MFC set to  0.000000
4/1/2010	9:20:28 PM	BCl3 MFC set to  0.000000
4/1/2010	9:20:28 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:20:28 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:20:28 PM	Tube furnace set to 0
4/1/2010	9:20:50 PM	Helium valve closed
4/1/2010	9:20:50 PM	H2 valve closed
4/1/2010	9:20:50 PM	BCl3 valve closed
4/1/2010	9:20:50 PM	PH3 valve closed
4/1/2010	9:20:50 PM	SiCl4 pre valve closed
4/1/2010	9:20:50 PM	SiCl4 post valve closed
4/1/2010	9:20:50 PM	Bubbler valve closed
4/1/2010	9:20:50 PM	Main Vac valve opened
4/1/2010	9:20:50 PM	Bypass valve opened
4/1/2010	9:20:50 PM	Helium MFC set to  0.000000
4/1/2010	9:20:50 PM	H2 MFC set to  0.000000
4/1/2010	9:20:50 PM	BCl3 MFC set to  0.000000
4/1/2010	9:20:50 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:20:50 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:20:50 PM	Tube furnace set to 0
4/1/2010	9:25:50 PM	H2 valve closed
4/1/2010	9:25:50 PM	BCl3 valve closed
4/1/2010	9:25:50 PM	PH3 valve closed
4/1/2010	9:25:50 PM	SiCl4 pre valve closed
4/1/2010	9:25:50 PM	SiCl4 post valve closed
4/1/2010	9:25:50 PM	Main Vac valve closed
4/1/2010	9:25:50 PM	Bypass valve closed
4/1/2010	9:25:50 PM	Bubbler valve closed
4/1/2010	9:25:50 PM	Helium valve opened
4/1/2010	9:25:50 PM	Helium MFC set to  500.000000
4/1/2010	9:25:50 PM	H2 MFC set to  0.000000
4/1/2010	9:25:50 PM	BCl3 MFC set to  0.000000
4/1/2010	9:25:50 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:25:50 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:25:50 PM	Tube furnace set to 0
4/1/2010	9:27:09 PM	Helium valve closed
4/1/2010	9:27:09 PM	H2 valve closed
4/1/2010	9:27:09 PM	BCl3 valve closed
4/1/2010	9:27:09 PM	PH3 valve closed
4/1/2010	9:27:09 PM	SiCl4 pre valve closed
4/1/2010	9:27:09 PM	SiCl4 post valve closed
4/1/2010	9:27:09 PM	Main Vac valve closed
4/1/2010	9:27:09 PM	Bypass valve closed
4/1/2010	9:27:09 PM	Bubbler valve closed
4/1/2010	9:27:09 PM	Helium MFC set to  0.000000
4/1/2010	9:27:09 PM	H2 MFC set to  0.000000
4/1/2010	9:27:09 PM	BCl3 MFC set to  0.000000
4/1/2010	9:27:09 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:27:09 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:27:09 PM	Tube furnace set to 0
4/1/2010	9:27:24 PM	Helium valve closed
4/1/2010	9:27:24 PM	H2 valve closed
4/1/2010	9:27:24 PM	BCl3 valve closed
4/1/2010	9:27:24 PM	PH3 valve closed
4/1/2010	9:27:24 PM	SiCl4 pre valve closed
4/1/2010	9:27:24 PM	SiCl4 post valve closed
4/1/2010	9:27:24 PM	Main Vac valve closed
4/1/2010	9:27:24 PM	Bubbler valve closed
4/1/2010	9:27:24 PM	Bypass valve opened
4/1/2010	9:27:24 PM	Helium MFC set to  0.000000
4/1/2010	9:27:24 PM	H2 MFC set to  0.000000
4/1/2010	9:27:24 PM	BCl3 MFC set to  0.000000
4/1/2010	9:27:24 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:27:24 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:27:24 PM	Tube furnace set to 0
4/1/2010	9:27:45 PM	Helium valve closed
4/1/2010	9:27:45 PM	H2 valve closed
4/1/2010	9:27:45 PM	BCl3 valve closed
4/1/2010	9:27:45 PM	PH3 valve closed
4/1/2010	9:27:45 PM	SiCl4 pre valve closed
4/1/2010	9:27:45 PM	SiCl4 post valve closed
4/1/2010	9:27:45 PM	Bubbler valve closed
4/1/2010	9:27:45 PM	Main Vac valve opened
4/1/2010	9:27:45 PM	Bypass valve opened
4/1/2010	9:27:45 PM	Helium MFC set to  0.000000
4/1/2010	9:27:45 PM	H2 MFC set to  0.000000
4/1/2010	9:27:45 PM	BCl3 MFC set to  0.000000
4/1/2010	9:27:45 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:27:45 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:27:46 PM	Tube furnace set to 0
4/1/2010	9:28:24 PM	Helium valve closed
4/1/2010	9:28:24 PM	H2 valve closed
4/1/2010	9:28:24 PM	BCl3 valve closed
4/1/2010	9:28:24 PM	PH3 valve closed
4/1/2010	9:28:24 PM	SiCl4 pre valve closed
4/1/2010	9:28:24 PM	SiCl4 post valve closed
4/1/2010	9:28:24 PM	Bubbler valve closed
4/1/2010	9:28:24 PM	Main Vac valve opened
4/1/2010	9:28:24 PM	Bypass valve opened
4/1/2010	9:28:24 PM	Helium MFC set to  0.000000
4/1/2010	9:28:24 PM	H2 MFC set to  0.000000
4/1/2010	9:28:24 PM	BCl3 MFC set to  0.000000
4/1/2010	9:28:24 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:28:24 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:28:25 PM	Tube furnace set to 0
4/1/2010	9:28:26 PM	Run finished at 9:28 PM
4/1/2010	9:28:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	9:35:45 PM	Bypass valve closed
4/1/2010	9:35:45 PM	Main Vac valve closed
4/1/2010	9:35:52 PM	Main Vac valve opened
4/1/2010	9:35:53 PM	Bypass valve opened
4/1/2010	9:36:22 PM	Recipe started at 9:36 PM
4/1/2010	9:36:22 PM	Helium valve closed
4/1/2010	9:36:22 PM	BCl3 valve closed
4/1/2010	9:36:22 PM	PH3 valve closed
4/1/2010	9:36:22 PM	SiCl4 pre valve closed
4/1/2010	9:36:22 PM	SiCl4 post valve closed
4/1/2010	9:36:22 PM	Main Vac valve closed
4/1/2010	9:36:22 PM	Bypass valve closed
4/1/2010	9:36:22 PM	Bubbler valve closed
4/1/2010	9:36:22 PM	H2 valve opened
4/1/2010	9:36:22 PM	Helium MFC set to  0.000000
4/1/2010	9:36:22 PM	H2 MFC set to  500.000000
4/1/2010	9:36:22 PM	BCl3 MFC set to  0.000000
4/1/2010	9:36:22 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:36:22 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:36:23 PM	Tube furnace set to 1000
4/1/2010	9:37:42 PM	Helium valve closed
4/1/2010	9:37:42 PM	BCl3 valve closed
4/1/2010	9:37:42 PM	PH3 valve closed
4/1/2010	9:37:42 PM	SiCl4 pre valve closed
4/1/2010	9:37:42 PM	SiCl4 post valve closed
4/1/2010	9:37:42 PM	Main Vac valve closed
4/1/2010	9:37:42 PM	Bypass valve closed
4/1/2010	9:37:42 PM	H2 valve opened
4/1/2010	9:37:42 PM	Bubbler valve opened
4/1/2010	9:37:42 PM	Helium MFC set to  0.000000
4/1/2010	9:37:42 PM	H2 MFC set to  500.000000
4/1/2010	9:37:42 PM	BCl3 MFC set to  0.000000
4/1/2010	9:37:42 PM	SiCl4 MFC set to  0.000000
4/1/2010	9:37:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:37:42 PM	Tube furnace set to 1000
4/1/2010	9:57:42 PM	Helium valve closed
4/1/2010	9:57:42 PM	BCl3 valve closed
4/1/2010	9:57:42 PM	PH3 valve closed
4/1/2010	9:57:42 PM	Main Vac valve closed
4/1/2010	9:57:42 PM	Bypass valve closed
4/1/2010	9:57:42 PM	H2 valve opened
4/1/2010	9:57:42 PM	SiCl4 pre valve opened
4/1/2010	9:57:42 PM	SiCl4 post valve opened
4/1/2010	9:57:42 PM	Bubbler valve opened
4/1/2010	9:57:42 PM	Helium MFC set to  0.000000
4/1/2010	9:57:42 PM	H2 MFC set to  500.000000
4/1/2010	9:57:42 PM	BCl3 MFC set to  0.000000
4/1/2010	9:57:42 PM	SiCl4 MFC set to  325.000000
4/1/2010	9:57:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	9:57:42 PM	Tube furnace set to 1000
4/1/2010	10:17:42 PM	Helium valve closed
4/1/2010	10:17:42 PM	BCl3 valve closed
4/1/2010	10:17:42 PM	PH3 valve closed
4/1/2010	10:17:42 PM	SiCl4 pre valve closed
4/1/2010	10:17:42 PM	SiCl4 post valve closed
4/1/2010	10:17:42 PM	Main Vac valve closed
4/1/2010	10:17:42 PM	Bypass valve closed
4/1/2010	10:17:42 PM	H2 valve opened
4/1/2010	10:17:42 PM	Bubbler valve opened
4/1/2010	10:17:42 PM	Helium MFC set to  0.000000
4/1/2010	10:17:42 PM	H2 MFC set to  500.000000
4/1/2010	10:17:42 PM	BCl3 MFC set to  0.000000
4/1/2010	10:17:42 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:17:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:17:42 PM	Tube furnace set to 750
4/1/2010	10:37:42 PM	H2 valve closed
4/1/2010	10:37:42 PM	BCl3 valve closed
4/1/2010	10:37:42 PM	PH3 valve closed
4/1/2010	10:37:42 PM	SiCl4 pre valve closed
4/1/2010	10:37:42 PM	SiCl4 post valve closed
4/1/2010	10:37:42 PM	Main Vac valve closed
4/1/2010	10:37:42 PM	Bypass valve closed
4/1/2010	10:37:42 PM	Helium valve opened
4/1/2010	10:37:42 PM	Bubbler valve opened
4/1/2010	10:37:42 PM	Helium MFC set to  500.000000
4/1/2010	10:37:42 PM	H2 MFC set to  0.000000
4/1/2010	10:37:42 PM	BCl3 MFC set to  0.000000
4/1/2010	10:37:42 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:37:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:37:42 PM	Tube furnace set to 0
4/1/2010	10:48:08 PM	Run aborted at 10:48 PM
4/1/2010	10:48:08 PM	Helium valve closed
4/1/2010	10:48:08 PM	H2 valve closed
4/1/2010	10:48:08 PM	BCl3 valve closed
4/1/2010	10:48:08 PM	PH3 valve closed
4/1/2010	10:48:08 PM	SiCl4 pre valve closed
4/1/2010	10:48:08 PM	SiCl4 post valve closed
4/1/2010	10:48:08 PM	Bypass valve closed
4/1/2010	10:48:08 PM	Main Vac valve closed
4/1/2010	10:48:08 PM	Bubbler valve closed
4/1/2010	10:48:08 PM	Helium MFC set to  0.000000
4/1/2010	10:48:08 PM	H2 MFC set to  0.000000
4/1/2010	10:48:08 PM	BCl3 MFC set to  0.000000
4/1/2010	10:48:08 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:48:09 PM	Tube furnace set to 0
4/1/2010	10:53:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	10:53:11 PM	Recipe started at 10:53 PM
4/1/2010	10:53:11 PM	Helium valve closed
4/1/2010	10:53:11 PM	H2 valve closed
4/1/2010	10:53:11 PM	BCl3 valve closed
4/1/2010	10:53:11 PM	PH3 valve closed
4/1/2010	10:53:11 PM	SiCl4 pre valve closed
4/1/2010	10:53:11 PM	SiCl4 post valve closed
4/1/2010	10:53:11 PM	Main Vac valve closed
4/1/2010	10:53:11 PM	Bubbler valve closed
4/1/2010	10:53:11 PM	Bypass valve opened
4/1/2010	10:53:11 PM	Helium MFC set to  0.000000
4/1/2010	10:53:11 PM	H2 MFC set to  0.000000
4/1/2010	10:53:11 PM	BCl3 MFC set to  0.000000
4/1/2010	10:53:11 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:53:11 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:53:11 PM	Tube furnace set to 0
4/1/2010	10:53:42 PM	Helium valve closed
4/1/2010	10:53:42 PM	H2 valve closed
4/1/2010	10:53:42 PM	BCl3 valve closed
4/1/2010	10:53:42 PM	PH3 valve closed
4/1/2010	10:53:42 PM	SiCl4 pre valve closed
4/1/2010	10:53:42 PM	SiCl4 post valve closed
4/1/2010	10:53:42 PM	Bubbler valve closed
4/1/2010	10:53:42 PM	Main Vac valve opened
4/1/2010	10:53:42 PM	Bypass valve opened
4/1/2010	10:53:42 PM	Helium MFC set to  0.000000
4/1/2010	10:53:42 PM	H2 MFC set to  0.000000
4/1/2010	10:53:42 PM	BCl3 MFC set to  0.000000
4/1/2010	10:53:42 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:53:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:53:43 PM	Tube furnace set to 0
4/1/2010	10:53:43 PM	Run finished at 10:53 PM
4/1/2010	10:53:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2010	10:57:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	10:57:35 PM	Recipe started at 10:57 PM
4/1/2010	10:57:35 PM	H2 valve closed
4/1/2010	10:57:35 PM	BCl3 valve closed
4/1/2010	10:57:35 PM	PH3 valve closed
4/1/2010	10:57:35 PM	SiCl4 pre valve closed
4/1/2010	10:57:35 PM	SiCl4 post valve closed
4/1/2010	10:57:35 PM	Main Vac valve closed
4/1/2010	10:57:35 PM	Bypass valve closed
4/1/2010	10:57:35 PM	Bubbler valve closed
4/1/2010	10:57:35 PM	Helium valve opened
4/1/2010	10:57:35 PM	Helium MFC set to  500.000000
4/1/2010	10:57:35 PM	H2 MFC set to  0.000000
4/1/2010	10:57:35 PM	BCl3 MFC set to  0.000000
4/1/2010	10:57:35 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:57:35 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:57:35 PM	Tube furnace set to 0
4/1/2010	10:58:56 PM	Helium valve closed
4/1/2010	10:58:56 PM	H2 valve closed
4/1/2010	10:58:56 PM	BCl3 valve closed
4/1/2010	10:58:56 PM	PH3 valve closed
4/1/2010	10:58:56 PM	SiCl4 pre valve closed
4/1/2010	10:58:56 PM	SiCl4 post valve closed
4/1/2010	10:58:56 PM	Main Vac valve closed
4/1/2010	10:58:56 PM	Bypass valve closed
4/1/2010	10:58:56 PM	Bubbler valve closed
4/1/2010	10:58:56 PM	Helium MFC set to  0.000000
4/1/2010	10:58:56 PM	H2 MFC set to  0.000000
4/1/2010	10:58:56 PM	BCl3 MFC set to  0.000000
4/1/2010	10:58:56 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:58:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:58:56 PM	Tube furnace set to 0
4/1/2010	10:59:11 PM	Helium valve closed
4/1/2010	10:59:11 PM	H2 valve closed
4/1/2010	10:59:11 PM	BCl3 valve closed
4/1/2010	10:59:11 PM	PH3 valve closed
4/1/2010	10:59:11 PM	SiCl4 pre valve closed
4/1/2010	10:59:11 PM	SiCl4 post valve closed
4/1/2010	10:59:11 PM	Main Vac valve closed
4/1/2010	10:59:11 PM	Bubbler valve closed
4/1/2010	10:59:11 PM	Bypass valve opened
4/1/2010	10:59:11 PM	Helium MFC set to  0.000000
4/1/2010	10:59:11 PM	H2 MFC set to  0.000000
4/1/2010	10:59:11 PM	BCl3 MFC set to  0.000000
4/1/2010	10:59:11 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:59:11 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:59:11 PM	Tube furnace set to 0
4/1/2010	10:59:33 PM	Helium valve closed
4/1/2010	10:59:33 PM	H2 valve closed
4/1/2010	10:59:33 PM	BCl3 valve closed
4/1/2010	10:59:33 PM	PH3 valve closed
4/1/2010	10:59:33 PM	SiCl4 pre valve closed
4/1/2010	10:59:33 PM	SiCl4 post valve closed
4/1/2010	10:59:33 PM	Bubbler valve closed
4/1/2010	10:59:33 PM	Main Vac valve opened
4/1/2010	10:59:33 PM	Bypass valve opened
4/1/2010	10:59:33 PM	Helium MFC set to  0.000000
4/1/2010	10:59:33 PM	H2 MFC set to  0.000000
4/1/2010	10:59:33 PM	BCl3 MFC set to  0.000000
4/1/2010	10:59:33 PM	SiCl4 MFC set to  0.000000
4/1/2010	10:59:33 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	10:59:33 PM	Tube furnace set to 0
4/1/2010	11:04:33 PM	H2 valve closed
4/1/2010	11:04:33 PM	BCl3 valve closed
4/1/2010	11:04:34 PM	PH3 valve closed
4/1/2010	11:04:34 PM	SiCl4 pre valve closed
4/1/2010	11:04:34 PM	SiCl4 post valve closed
4/1/2010	11:04:34 PM	Main Vac valve closed
4/1/2010	11:04:34 PM	Bypass valve closed
4/1/2010	11:04:34 PM	Bubbler valve closed
4/1/2010	11:04:34 PM	Helium valve opened
4/1/2010	11:04:34 PM	Helium MFC set to  500.000000
4/1/2010	11:04:34 PM	H2 MFC set to  0.000000
4/1/2010	11:04:34 PM	BCl3 MFC set to  0.000000
4/1/2010	11:04:34 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:04:34 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:04:34 PM	Tube furnace set to 0
4/1/2010	11:05:55 PM	Helium valve closed
4/1/2010	11:05:55 PM	H2 valve closed
4/1/2010	11:05:55 PM	BCl3 valve closed
4/1/2010	11:05:55 PM	PH3 valve closed
4/1/2010	11:05:55 PM	SiCl4 pre valve closed
4/1/2010	11:05:55 PM	SiCl4 post valve closed
4/1/2010	11:05:55 PM	Main Vac valve closed
4/1/2010	11:05:55 PM	Bypass valve closed
4/1/2010	11:05:55 PM	Bubbler valve closed
4/1/2010	11:05:55 PM	Helium MFC set to  0.000000
4/1/2010	11:05:55 PM	H2 MFC set to  0.000000
4/1/2010	11:05:55 PM	BCl3 MFC set to  0.000000
4/1/2010	11:05:55 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:05:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:05:55 PM	Tube furnace set to 0
4/1/2010	11:06:10 PM	Helium valve closed
4/1/2010	11:06:10 PM	H2 valve closed
4/1/2010	11:06:10 PM	BCl3 valve closed
4/1/2010	11:06:10 PM	PH3 valve closed
4/1/2010	11:06:10 PM	SiCl4 pre valve closed
4/1/2010	11:06:10 PM	SiCl4 post valve closed
4/1/2010	11:06:10 PM	Main Vac valve closed
4/1/2010	11:06:10 PM	Bubbler valve closed
4/1/2010	11:06:10 PM	Bypass valve opened
4/1/2010	11:06:10 PM	Helium MFC set to  0.000000
4/1/2010	11:06:10 PM	H2 MFC set to  0.000000
4/1/2010	11:06:10 PM	BCl3 MFC set to  0.000000
4/1/2010	11:06:10 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:06:10 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:06:10 PM	Tube furnace set to 0
4/1/2010	11:06:32 PM	Helium valve closed
4/1/2010	11:06:32 PM	H2 valve closed
4/1/2010	11:06:32 PM	BCl3 valve closed
4/1/2010	11:06:32 PM	PH3 valve closed
4/1/2010	11:06:32 PM	SiCl4 pre valve closed
4/1/2010	11:06:32 PM	SiCl4 post valve closed
4/1/2010	11:06:32 PM	Bubbler valve closed
4/1/2010	11:06:32 PM	Main Vac valve opened
4/1/2010	11:06:32 PM	Bypass valve opened
4/1/2010	11:06:32 PM	Helium MFC set to  0.000000
4/1/2010	11:06:32 PM	H2 MFC set to  0.000000
4/1/2010	11:06:32 PM	BCl3 MFC set to  0.000000
4/1/2010	11:06:32 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:06:32 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:06:32 PM	Tube furnace set to 0
4/1/2010	11:11:32 PM	H2 valve closed
4/1/2010	11:11:32 PM	BCl3 valve closed
4/1/2010	11:11:32 PM	PH3 valve closed
4/1/2010	11:11:32 PM	SiCl4 pre valve closed
4/1/2010	11:11:33 PM	SiCl4 post valve closed
4/1/2010	11:11:33 PM	Main Vac valve closed
4/1/2010	11:11:33 PM	Bypass valve closed
4/1/2010	11:11:33 PM	Bubbler valve closed
4/1/2010	11:11:33 PM	Helium valve opened
4/1/2010	11:11:33 PM	Helium MFC set to  500.000000
4/1/2010	11:11:33 PM	H2 MFC set to  0.000000
4/1/2010	11:11:33 PM	BCl3 MFC set to  0.000000
4/1/2010	11:11:33 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:11:33 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:11:33 PM	Tube furnace set to 0
4/1/2010	11:12:54 PM	Helium valve closed
4/1/2010	11:12:54 PM	H2 valve closed
4/1/2010	11:12:54 PM	BCl3 valve closed
4/1/2010	11:12:54 PM	PH3 valve closed
4/1/2010	11:12:54 PM	SiCl4 pre valve closed
4/1/2010	11:12:54 PM	SiCl4 post valve closed
4/1/2010	11:12:54 PM	Main Vac valve closed
4/1/2010	11:12:54 PM	Bypass valve closed
4/1/2010	11:12:54 PM	Bubbler valve closed
4/1/2010	11:12:54 PM	Helium MFC set to  0.000000
4/1/2010	11:12:54 PM	H2 MFC set to  0.000000
4/1/2010	11:12:54 PM	BCl3 MFC set to  0.000000
4/1/2010	11:12:54 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:12:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:12:54 PM	Tube furnace set to 0
4/1/2010	11:13:09 PM	Helium valve closed
4/1/2010	11:13:09 PM	H2 valve closed
4/1/2010	11:13:09 PM	BCl3 valve closed
4/1/2010	11:13:09 PM	PH3 valve closed
4/1/2010	11:13:09 PM	SiCl4 pre valve closed
4/1/2010	11:13:09 PM	SiCl4 post valve closed
4/1/2010	11:13:09 PM	Main Vac valve closed
4/1/2010	11:13:09 PM	Bubbler valve closed
4/1/2010	11:13:09 PM	Bypass valve opened
4/1/2010	11:13:09 PM	Helium MFC set to  0.000000
4/1/2010	11:13:09 PM	H2 MFC set to  0.000000
4/1/2010	11:13:09 PM	BCl3 MFC set to  0.000000
4/1/2010	11:13:09 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:13:09 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:13:10 PM	Tube furnace set to 0
4/1/2010	11:13:32 PM	Helium valve closed
4/1/2010	11:13:32 PM	H2 valve closed
4/1/2010	11:13:32 PM	BCl3 valve closed
4/1/2010	11:13:32 PM	PH3 valve closed
4/1/2010	11:13:32 PM	SiCl4 pre valve closed
4/1/2010	11:13:32 PM	SiCl4 post valve closed
4/1/2010	11:13:32 PM	Bubbler valve closed
4/1/2010	11:13:32 PM	Main Vac valve opened
4/1/2010	11:13:32 PM	Bypass valve opened
4/1/2010	11:13:32 PM	Helium MFC set to  0.000000
4/1/2010	11:13:32 PM	H2 MFC set to  0.000000
4/1/2010	11:13:32 PM	BCl3 MFC set to  0.000000
4/1/2010	11:13:32 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:13:32 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:13:32 PM	Tube furnace set to 0
4/1/2010	11:16:21 PM	Helium valve closed
4/1/2010	11:16:21 PM	H2 valve closed
4/1/2010	11:16:21 PM	BCl3 valve closed
4/1/2010	11:16:21 PM	PH3 valve closed
4/1/2010	11:16:21 PM	SiCl4 pre valve closed
4/1/2010	11:16:21 PM	SiCl4 post valve closed
4/1/2010	11:16:21 PM	Bubbler valve closed
4/1/2010	11:16:21 PM	Main Vac valve opened
4/1/2010	11:16:21 PM	Bypass valve opened
4/1/2010	11:16:21 PM	Helium MFC set to  0.000000
4/1/2010	11:16:21 PM	H2 MFC set to  0.000000
4/1/2010	11:16:21 PM	BCl3 MFC set to  0.000000
4/1/2010	11:16:21 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:16:21 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:16:21 PM	Tube furnace set to 0
4/1/2010	11:16:22 PM	Run finished at 11:16 PM
4/1/2010	11:16:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
4/1/2010	11:16:27 PM	Main Vac valve closed
4/1/2010	11:16:27 PM	Bypass valve closed
4/1/2010	11:16:32 PM	Main Vac valve opened
4/1/2010	11:16:33 PM	Bypass valve opened
4/1/2010	11:18:05 PM	Recipe started at 11:18 PM
4/1/2010	11:18:05 PM	Helium valve closed
4/1/2010	11:18:05 PM	BCl3 valve closed
4/1/2010	11:18:05 PM	PH3 valve closed
4/1/2010	11:18:05 PM	SiCl4 pre valve closed
4/1/2010	11:18:05 PM	SiCl4 post valve closed
4/1/2010	11:18:05 PM	Main Vac valve closed
4/1/2010	11:18:05 PM	Bypass valve closed
4/1/2010	11:18:05 PM	Bubbler valve closed
4/1/2010	11:18:05 PM	H2 valve opened
4/1/2010	11:18:05 PM	Helium MFC set to  0.000000
4/1/2010	11:18:05 PM	H2 MFC set to  500.000000
4/1/2010	11:18:05 PM	BCl3 MFC set to  0.000000
4/1/2010	11:18:05 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:18:05 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:18:05 PM	Tube furnace set to 1000
4/1/2010	11:19:26 PM	Helium valve closed
4/1/2010	11:19:26 PM	BCl3 valve closed
4/1/2010	11:19:26 PM	PH3 valve closed
4/1/2010	11:19:26 PM	SiCl4 pre valve closed
4/1/2010	11:19:26 PM	SiCl4 post valve closed
4/1/2010	11:19:26 PM	Main Vac valve closed
4/1/2010	11:19:26 PM	Bypass valve closed
4/1/2010	11:19:26 PM	H2 valve opened
4/1/2010	11:19:26 PM	Bubbler valve opened
4/1/2010	11:19:26 PM	Helium MFC set to  0.000000
4/1/2010	11:19:26 PM	H2 MFC set to  500.000000
4/1/2010	11:19:26 PM	BCl3 MFC set to  0.000000
4/1/2010	11:19:26 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:19:26 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:19:26 PM	Tube furnace set to 1000
4/1/2010	11:39:26 PM	Helium valve closed
4/1/2010	11:39:26 PM	BCl3 valve closed
4/1/2010	11:39:26 PM	PH3 valve closed
4/1/2010	11:39:26 PM	Main Vac valve closed
4/1/2010	11:39:26 PM	Bypass valve closed
4/1/2010	11:39:26 PM	H2 valve opened
4/1/2010	11:39:26 PM	SiCl4 pre valve opened
4/1/2010	11:39:26 PM	SiCl4 post valve opened
4/1/2010	11:39:26 PM	Bubbler valve opened
4/1/2010	11:39:26 PM	Helium MFC set to  0.000000
4/1/2010	11:39:26 PM	H2 MFC set to  500.000000
4/1/2010	11:39:26 PM	BCl3 MFC set to  0.000000
4/1/2010	11:39:26 PM	SiCl4 MFC set to  325.000000
4/1/2010	11:39:26 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:39:26 PM	Tube furnace set to 1000
4/1/2010	11:59:26 PM	Helium valve closed
4/1/2010	11:59:26 PM	BCl3 valve closed
4/1/2010	11:59:26 PM	PH3 valve closed
4/1/2010	11:59:26 PM	SiCl4 pre valve closed
4/1/2010	11:59:26 PM	SiCl4 post valve closed
4/1/2010	11:59:26 PM	Main Vac valve closed
4/1/2010	11:59:26 PM	Bypass valve closed
4/1/2010	11:59:26 PM	H2 valve opened
4/1/2010	11:59:26 PM	Bubbler valve opened
4/1/2010	11:59:26 PM	Helium MFC set to  0.000000
4/1/2010	11:59:26 PM	H2 MFC set to  500.000000
4/1/2010	11:59:26 PM	BCl3 MFC set to  0.000000
4/1/2010	11:59:26 PM	SiCl4 MFC set to  0.000000
4/1/2010	11:59:26 PM	Bypass solenoid MFC set to  0.000000
4/1/2010	11:59:26 PM	Tube furnace set to 750
